Furnace Structure
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The tube furnace has three layers
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Heating element: center spiral type SiC filament ( 25 OD x 20 ID x 400 L mm )
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SiC sheath: quartz tube ID 30 × OD 36 mm × 622 mm.
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Sample layer: 36 ID × 58 OD × 622 mm L with vacuum sealed flange.
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Gas-cooled layer: 58ID × 90 OD × 622mm L to keep outside wall < 30ºC
customized size tube is available upon request |
Power |
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208 - 240 VAC, single phase
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2000W
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Working Temperature |
Max. Temperature: 300 °C (< 1 hr)
Continuous working temperature: 250 °C |
Heating Rate |
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Max. Heating Rate: 10°C /min
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Heating Zone |
Heating Zone Length: 1000 mm
Constant Temperature Zone: 700 mm within +/- 2oC |
Temperature Controller |
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PID automatic control and auto-tune function.
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30 programmable segments for precise process
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Built in protection for overheated and broken Thermal couple.
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Temperature Accuracy: +/- 1 °C
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K-type thermal couple
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Vacuum Flange (Sold Separately) |
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Special flange for three layers tube is included
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1" flange is included for center tube
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Fitting Ports (Sold Separately)
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Both flanges will come standard with 3/8" barbed hose fittings
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In order to increase the throughput and achieve a high vacuum, you may replace the standard barbed hose fitting with theKF25 adapter
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For supplying high-pressure gas, you may replace the standard barbed hose fitting with the 304SS 1/4" Swagelok® Tube Fitting x 1/4" BSPP Male Connector
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Vacuum Pressure |
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Limited by vacuum pump
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50 mtorr can be achieved by mechanical pump
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10^-5 torr can be reached by molecular pump
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Digital Pressure Gauge (optional) |
A gas-type independent (above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by incorrect reading of gas pressures due to gas-type dependency. |
Warranty |
One year limited warranty with lifetime support. |
Compliance |
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CE Certified
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All electric parts are UL / MET / CSA certified
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The furnace is ready to pass UL or CSA certification (UL61010 or SPE1000) on customer side at customer cost.
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Application Notes
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Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
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Attention: A two stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
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Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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Please contact us to see our typical temperature profile calibration results at various temperatures.
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In order obtain accurate temperature inside tube furnace, please contact us to learn how to calibrate the temperature on your own.
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