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1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System
  • 1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System
  • 1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System
  • 1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System
  • 1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System
  • 1200℃ Dual Zone Split Tube Furnace with Revolving Sample Feeding System



    KJ-1200X-II-ZL is a hybrid PVD and CVD ( HPCVD) deposition system with four evaporation sources for preparing multilayer 2D materials up to 1200oC. The system is consists of a dual-zone split tube furnace with the revolving sample feeding system

    Specific Introduction:
        KJ-1200X-II-ZL is a hybrid PVD and CVD  ( HPCVD) deposition system with four evaporation sources for preparing multilayer 2D materials up to 1200oC.  The system is consists of a dual-zone split tube furnace with the revolving sample feeding system that can drive the crucible into a processing tube at the desired temperature in the different position of the heating zone. The revolving feed system can push and draw a crucible with evaporation material through the atmosphere controlled tube furnace and sequentially evaporate the material one by one up to four crucibles as the program.  Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each sample. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting. 
    Furnace Structure
    • Two independent temperature controllers to control each zone's temperature.
    • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
    • High purity fibrous alumina insulation for maximum energy saving.
    • The special refractory coating on liner and heating element helps increase furnace service life.
    • Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.       
    Power Requirement
    • Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
    Heating Zone Length
    • Two zones: each zone length is 8" (200 mm)
    • Total 16" (400 mm) heating zone
    Constant Temp. Zone
    • 150mm (+/-1°C) for each heating zone
    • A longer constant temperature zone ( about 250mm ) can be created by setting both zones at the same temperature    
    Temperature Range 100~1100°C (Continuous); 1200°C (for limiting
    Max. Heating Rate ≤ 20°C /min
    Revolving Feeding Stock System
    • One thermocouple connects to the crucible from the left flange . The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
    • Four crucibles can be simultaneously placed into the revolving feed system and sequentially delivered to the quartz tube under vacuum or inert gas one by one .                      
    Crucible Movement Control
    • The crucible moving speed and distance are controlled by a stepper motor.
    • Crucible traveling distance: 1mm ~ 200mm
    Temperature Controllers
    • Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
    • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1ºC temperature accuracy.
    • Two K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:
      • The furnace can be operated by PC with an MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop). 
      • Eurotherm 3000 controllers are available with +/- 0.1ºC accuracy at the extra cost.              
    Tube Accessories
    • One fused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
    • Four quartz crucibles for evaporation are included
    Digital Vacuum Gauge
    • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
    • Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
    Vacuum Pump
    • Double Stage Rotary Vane Vacuum Pump is included.
    • SS vacuum pipe & ball valve with KF25 adaptor generate 1E-2 torr vacuum.
    Gas Flow Control System
    • Three-channel Gas Control System with PLC Touchscreen is included.
    • Three mobile carts are included to support the furnace and the revolving feed system.
    Water Chiller
    • A 16L/min recirculating water chiller is included for cooling the flange.
    • Short water power off and Over-temperature alarm built-in.
    Dimensions  2400mm(L) x 600mm(W) x 1300mm(H)   
    Warranty One year limited warranty with lifetime support.
    • Compliance
    • CE Certified
    Application Notes

    • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars. Vacuum pressure may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.
    • Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. 
    • You can set up the different temperature with each zone to create a thermal gradient for CVD deposition.


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