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  • 1200℃ Dual Quartz Tubes & Three Zones Tube Furnace


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-5-III-D4 is a dual tube and three-zone tube furnace with max. the working temperature of 1200°C  for growing thin films on metallic foil by CVD, specially designed to make graphene and the flexible electrode for solar or battery electrode.

    • Dual quartz tube:  130 mm Dia (5"). outside tube suspended by 101 mm Dia (4")  tube inside. The metallic foil will be wrapped inside tube surface for CVD reaction
    • Vacuum sealing flanges for the dual tube, which allow reactive gas to go through between two tubes ( 20mm space ) for reaction, and forced air can go through the central tube for fast cooling.
    • Max. Working Temperature:  1200°C   
    • Valve and vacuum gauge is included

    Furnace structure
    • Three heating zones: (900mm, 36" in total)
      • Zone 1: 300mm  (11.8")
      • Zone 2: 300mm  (11.8")
      • Zone 3: 300 mm (11.8")
    • Max. 25" (625 mm) long with +/- 1°C accuracy if set three zones at the same temperature.
    • Three precision temperature controllers with 30 segment programmable and +/- 1° C accuracy.
    • Max. Working Temperature:  1200°C 
    • Continuous Working Temperature:  1100°C
    • Heating Rate: <= 20°C /min  
    • Constant Temperature Zone: 25" (625 mm) length (Three zones are heating at equal temperature simultaneously)
    •  AC 208-240V Single Phase, 50/60 Hz (40A breaker required).
    • 7 KW  Max.
    • Powder cord is included without a plug.
    • CE certified 
    Processing Tubes
    • Two High purity Fused Quartz Tubes included
    • Outside tube: 130mm O.D. x 122 mm I.D. x 1480 mm
    • Inside tube: 102mm O.D. x   94 mm I.D. x 1800 mm

    Vacuum sealed flanges
    • One pair of flange made of SS304, which seals tightly between tubes by two high-temperature O-rings (10-2 by the mechanical pump and 10-5 by the molecular pump ). 
    • The flange is built with water cooling jacket. When working temperature over 900°C, it is required to use cooling water. You may either use tap water or use our chilling water circulation at picture below
    • One KF25 adapter is installed on the left flange to connect a vacuum pump.
    • One stainless steel needle valve is installed on right flange
    • Optional.  You may order a  Compact  Liquid Vaporization Systems for better CVD
     Optional Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u
     Furnace Dimension 1030 x 430 x 580 mm  ( not included flange and tube )
    Net Weight about 90 kg
    Shipping package size after crating 65"x45"x35"
    Warranty One year limited warranty for electrical parts. (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please contact us to order the replacement at related products.)
    • CE Certified
    • NRTL (UL61010) or CSA certification is available upon request at extra cost.
    Updated idea
    • You may put the furnace on a 1200 mm length mobile cart
    • you may order our gas mixing module to support the furnace and deliver multi-gas to the dual tube furnace

    Click here to learn the installation of a gas regulator
    • All quartz tube furnaces  are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
    • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
    • For the use of flammable gasses such as H2 and CH4, please consult with MTI technical team for safety measures. We Strongly suggest that the furnace needs to be operated inside a fume hood with an H2/CH4 leaking detector installed.

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