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High Temperature Chemical Vapor Deposition System
  • High Temperature Chemical Vapor Deposition System
  • High Temperature Chemical Vapor Deposition System
  • High Temperature Chemical Vapor Deposition System
  • High Temperature Chemical Vapor Deposition System
  • High Temperature Chemical Vapor Deposition System

    Model:KJ-CVD-1700-60*300-F3

    Description:

    Product Information Model KJ-CVD-1700-60*300-F3 Heatings system Display LED Limit Temperature 1700℃ Continuous Working Temp. &

    Product Information
    Model KJ-CVD-1700-60*300-F3
    Heatings system Display LED
    Limit Temperature 1700℃
    Continuous Working Temp. ≤1600℃
    Heating Rate Suggestion: 0~15℃/min (max. 20℃/min)
    Heating Zone Length 300mm
    Heating Element MoSi2 rod
    Thermocouple B type
    Temperature Control Accuracy ±1℃
    Tube Size 60 x 900mm for reference (OD x L )
    Material: alumina
    Temperature Control PID automatic control via SCR power control
    Heating process 30 steps programmable
    Power source 220V, 50 Hz, single phase at max. 4KW
    Max working pressure 0.02MPa
    Vacuum System
     
    Vacuum Pump Group
    (rotary vane pump+diffusion pump)
    Include KF25, KF50 adapter,  bellow for vacuum pump group and mobile cabinet with wheels.
     
     
    Ultimate vacuum 6.67*10-3Pa under cold state.
       
    Vacuum gauge Composite vacuum gauge.
    Vacuum Flange Stainless Steel vacuum flange with valves and needles
    Mass Flow meters(3 gas-route Ar, H2,CH4)
     
    Flow scope (20, 30, 50, 100, 200, 300, 500) SCCM
    Accuracy ±1.5 % F.S.
    Repeat accuracy ±1.5 % F.S.
    Response time ≦10sec
    Working pressure difference range 0.1~0.5MPa
    Pressure resistance 3MPa
    Temperature Coefficient Zero: ≤±0.2% F.S./℃; Span: ≤±0.2% F.S./℃
    Working environment temperature 5~45℃
    Input signal 0 V ~ +5.00 V
    Output signal 0 V ~ +5.00 V
      Electric plug form DB15 pin(Female)
      Power +15 V 50 mA
    -15V 200 mA

    cvd system

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

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    Zhengzhou/Kejia

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