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  • Kejia KJ-T1200 Double Zones CVD System


    Continuous Temp:

    Chamber/Tube size:


    Brief Introduction:  
        KJ-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion. 
    Technical Parameter:
    Brand Kejia
    Model KJ-T1200
    Part I: Standard Parts
    Tube Furnace
    Display LED type
    Max. Temp. 1200℃ for limiting
    Woking Temp. ≤1100℃
    Heating Rate Suggestion: 0~10℃/min,max. 15℃/min
    Temperature Zone 300mm + 300mm dual zones
    Heating Element Resistance wire
    Thermocouple K type
    Temperature Control Accuracy ±1℃ ()
    Tube Size 60 / 52mmx 1000mm (OD/ID x L)
    Material:  Quartz tube 
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange.
    One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge. 

    Another end of the flange has a KF25 port with a barbed needle valve 
    Power 220V, 50 Hz, single phase at max. 6KW
    Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.
    Vacuum inside the tube is around 10-1 Torr.
    (RM temp. And empty tube condition)
    Flow rate: 2.6 L/S
     (pump photo is only for reference, actual appearance depends on final desgin)
    The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories
    Digital vacuum gauge is included
    3.8x10-5 to 1125 Torr measurement range
    Anti-corrosive, gas-type independent 
    Customized Mass Flow Meters
    (Seven Star Brand)
    With LCD Touch Screen Controller
    (Desigen by Kejia with Kejia logo)
    One Float flowmeter + Four  precision mass flow meters :
    MFC Accuracy is: ±1.5% F.S.
    MFC 1 for Nitrogen : Gas flow range from 0~100 sccm
    MFC 2 for Hydrogen : Gas flow range from 0~100 sccm
    MFC 3 for Methan : Gas flow range from 0~100 sccm
    MFC 4 for Argon: Gas flow range from 0~100 sccm
    MFC 5 for Oxygen: Gas flow range from 0~100 sccm
    FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm
    One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.
    LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:

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