Automatic pressure control CVD tube furnace system

Brief Introduction:
It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.

The main features are as below:
1. Great temperature uniformity.
2. Over temperature protection and alarm
3. PID automatic control via SCR power control

Part I

Technical Parameter:

Model	KJ-1200T
Display	LED
Max. Temp.	1200C
Working Temp.	≤1100℃
Heating Rate	Suggestion 0~10℃/min(max. 20℃/min)
Temperature Zone	200mm+200mm+200mm
Temperature Control Accuracy	±1℃
Tube Size	Φ50mm x 1200mm OD x L
Heating Element	Fe-Cr-Al Alloy doped by Mo
Thermocouple	K Type
Max. Power	6.0 KW
Working Voltage	AC 208V-240V single phase, 50 Hz (or according to your requirement)
Temperature Control	PID automatic control via SCR power control
Heating curves	30 steps programmable
Chamber material	Alumina Fiber
Warranty	One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)
Standard Accessories	Hook x 1 piece Tube block x 1 pair Silicone O rings x 4pcs

Part II

Pressure Regulation System

One mass flow meter	Which can regulate according to pump pressure
pressure sensor	(inficon brand: measuring range:3.8x10-5 to 1125 Torr ) installed on outlet of furnace tube.
Touch Screen PLC Controller	Regulate pressure from 50-300torr
Notice:	The regulate pressure is under furnace in horizontal direction. The result maybe different in vertical direction.

Part III
Pirani Vacuum Gauge

Installed on gas inlet side of furnace
tube
Measuring range: 1×10⁵~1×10^-1Pa

Part IV
4 Channels MFC Gas Mixing Station

Technical Parameter:

Display	LCD Touch Screen
Working Temperature	5~45 ºC
Max. Pressure:	3x10⁶Pa
Accuracy:	±1.5% FS
Liner	±（0.5-1.5）%F.S.
Duplicate accuracy:	±0.2%F.S.
Structure	Four precision mass flow meters: MFC 1: Flow range from 0~600 sccm for Ar MFC 2: Flow range from 0~600 sccm for N2 MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2) MFC4: Oxygen:0-600sccm One gas mixing tank is installed on bottom case 5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
Pls note	Liquid or corrosion not supported.

Reference Photo:

Part V
Scroll Vacuum Pump
pats

Item Introduction:
Scroll pump is a new kind of oil-free mechanical pump with features of simple construction,
good sealing, high vacuum ect. As a high technology product, it has highly technical requirement in desigh and manufacture. With benefits of low consumption, long working life, high reliability, and low noise, It has incomparable advantages in the application of clean process and has been popularly used in the market. GVD, GSP series scroll dry pumps are scroll dry pumps with excellent performance and obvious price competitiveness, which are introduced by Baosi Vacuum for the characteristics of downstream applications at home and abroad.

Application:
Clean vacuum, Backing turbomolecular pumps, Library, Analysis equipment, Leak detection, Beam line, Scientific researching, Medical equipment, Distillation/extraction/filtration, Laser, Semiconductor（LED/LCD), Photovoltaic, Coating（PVD/CVD), Battery, Glove box, Beam welding/laser welding, Space simulation.

Technical Parameter

Nominal Rotation Speed	1800 rpm
Displacement	3L/S
Ultimate Vacuum	0.008mbar
Motor Power	400W
Voltage Input	Single Phase 100-240V
Dimensions	430×255×290mm (L×W×H)
Noise Level	54dBA
Inlet Flange	NW 25
Exhaust Flange	NW 25
Max Water Vapour Pumping Rate	100 gh^-1
Leak Tightness	< 1×10^-6mbar·l/s
Weight	28kg
Cooling System	Air cooled
Operating Temperature	10 to 40℃
The cart, bellow and clamp are included for one pump.

Part VI Cold Trap

Cold Trap

Customized model,need to cooperate with water chiller

Part VII Water Chiller

Model	CW-5000
Power Supply	220V 50Hz
Cooling Capacity	1000W
Refrigerant Type	R134a
Precision	± 0.3℃
Pump Power	0.03 kW
Max. Lift	8M
Flow	10L/min
Tank Capacity	7L
Inlet and Outlet	Internal Φ8mm speedy connector Pagoda-shape connectors
Weight	28 Kg
Control Type	Digital Display
Dimension	552843cm (LWH)