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  • Automatic pressure control CVD tube furnace system


    Continuous Temp:

    Chamber/Tube size:


    Brief Introduction:  
    It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.
    The main features are as below:
    1. Great temperature uniformity.
    2. Over temperature protection and alarm
    3. PID automatic control via SCR power control

    Part I
    Technical Parameter:
    Model KJ-1200T
    Display LED
    Max. Temp. 1200C
    Working Temp. ≤1100℃
    Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
    Temperature Zone 200mm+200mm+200mm
    Temperature Control Accuracy ±1℃
      Tube Size Φ50mm x 1200mm  OD x L
    Heating Element Fe-Cr-Al Alloy doped by Mo  
    Thermocouple K Type
    Max. Power 6.0 KW
    Working Voltage AC 208V-240V single phase, 50 Hz (or according to your requirement)
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Chamber material Alumina Fiber
    Warranty One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)
    Standard Accessories Hook x 1 piece
    Tube block x 1 pair
    Silicone O rings x 4pcs

     Part II
    Pressure Regulation System
    One mass flow meter Which can regulate according to pump
    tubflow meter
    pressure sensor
    (inficon brand: measuring range:3.8x10-5 to 1125
    Torr ) installed on outlet of furnace tube.
    pressure sensor 
    Touch Screen PLC Controller Regulate pressure from 50-300torr
    PLC controller 
    Notice: The regulate pressure is under furnace in horizontal direction.
    The result maybe different in vertical direction.
    Part III
    Pirani Vacuum Gauge
    tube furance parts  Installed on gas inlet side of furnace
    Measuring range: 1×105~1×10-1Pa
    Part IV
    4 Channels MFC Gas Mixing Station
    Technical Parameter:
    Display LCD Touch Screen
    Working Temperature 5~45 ºC
    Max. Pressure: 3x10Pa
    Accuracy: ±1.5% FS
    Liner ±(0.5-1.5)%F.S.
    Duplicate accuracy: ±0.2%F.S.
    Structure Four precision mass flow meters:
    MFC 1: Flow range from 0~600 sccm for Ar
    MFC 2: Flow range from 0~600 sccm for N2
    MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2)  
    MFC4: Oxygen:0-600sccm
    One gas mixing tank is installed on bottom case
    5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
    Pls note Liquid or corrosion not supported.
    Reference Photo:
     tube furnace parts
    Part V
    Scroll Vacuum Pump
    Item Introduction:
    Scroll pump is a new kind of oil-free mechanical  pump with features of simple construction,
    good sealing, high vacuum ect. As a high technology product, it has highly technical  requirement in desigh and manufacture. With benefits of low consumption, long working life, high reliability, and low noise, It has incomparable advantages in the application of clean process and has been popularly used in the market. GVD, GSP series scroll dry pumps are scroll dry pumps with excellent performance and obvious price competitiveness, which are introduced by Baosi Vacuum for the characteristics of downstream applications at home and abroad.
    Clean vacuum, Backing turbomolecular pumps, Library, Analysis equipment, Leak detection, Beam line, Scientific researching, Medical equipment, Distillation/extraction/filtration, Laser, Semiconductor(LED/LCD), Photovoltaic, Coating(PVD/CVD), Battery, Glove box, Beam welding/laser welding, Space simulation.
    Technical Parameter
    Nominal Rotation Speed 1800 rpm
    Displacement 3L/S
    Ultimate Vacuum 0.008mbar
    Motor Power 400W
    Voltage Input Single Phase 100-240V
    Dimensions 430×255×290mm (L×W×H)
    Noise Level 54dBA
    Inlet Flange NW 25
    Exhaust Flange NW 25
    Max Water Vapour Pumping Rate 100 gh-1
    Leak Tightness < 1×10-6mbar·l/s
    Weight 28kg
    Cooling System Air cooled
    Operating Temperature 10 to 40℃
    The cart, bellow and clamp are included for one pump.
    Part VI Cold Trap
    Cold Trap Customized model,need to cooperate with water chiller
    Part VII Water Chiller
    Model CW-5000
    Power Supply 220V 50Hz
    Cooling Capacity 1000W
    Refrigerant Type R134a
    Precision ± 0.3℃
    Pump Power 0.03 kW
    Max. Lift 8M
    Flow 10L/min
    Tank Capacity 7L
    Inlet and Outlet Internal Φ8mm speedy connector
    Pagoda-shape connectors
    Weight 28 Kg
    Control Type Digital Display
    Dimension 55*28*43cm (L*W*H)
    Part VIII Filter
    Used in the inlet of vacuum pump
    cvd tube furnace

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