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Position:![[!--oldtitle--]](/d/file/uploads/210417/1-21041G02HD62.jpg)
E-mail:
Tell:
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Product introduction:
KJ-T1200-S60K3-3Z type CVD system consists of KJ-T1200 tube furnace + vacuum system + gas supply system, the highest temperature can reach 1200 degrees, three temperature zone control, ultimate vacuum can reach 10Pa, gas supply system It adopts accurate digital display three-way mass flowmeter, and the number of gas mixing paths is 3 ways to mix.
Main application: The system is widely used in various CVD experiments with a reaction temperature of about 1100°C. It can also be used in many research fields such as vacuum sintering, vacuum atmosphere protective sintering, nanomaterial preparation, battery material preparation and so on.
Technical Parameters:
KJ-T1200-S60K3-3Z type CVD system consists of KJ-T1200 tube furnace + vacuum system + gas supply system, the highest temperature can reach 1200 degrees, three temperature zone control, ultimate vacuum can reach 10Pa, gas supply system It adopts accurate digital display three-way mass flowmeter, and the number of gas mixing paths is 3 ways to mix.
Main application: The system is widely used in various CVD experiments with a reaction temperature of about 1100°C. It can also be used in many research fields such as vacuum sintering, vacuum atmosphere protective sintering, nanomaterial preparation, battery material preparation and so on.
Technical Parameters:
| High temperature furnace shell | The double-layer shell structure is equipped with an air cooling system, so that the surface temperature of the shell is less than 55℃, and the inner furnace surface is coated with 1750℃ imported alumina coating material to improve reflectivity and furnace cleanliness |
| power | 6 KW |
| Voltage | AC 208-240V single phase, 50/60 Hz |
| Heating element | Alloy resistance wire |
| Maximum temperature | 1200°C |
| Continuous working temperature | 1100°C |
| Heating rate | The fastest 20℃/min recommended 10℃/min |
| Furnace tube material and size | Quartz tube: OD: 60mm x Length: 1000 mm |
| Length of heating zone | Three temperature zones: 220+220+220 mm |
| Temperature control system | PID 30-segment programmable temperature control |
| Temperature control accuracy | +/- 1 ℃ |
| Vacuum sealing system | Two stainless steel sealing flanges (vacuum gauge and shut-off valve are installed on it) |
| Vacuum system |
1. VRD-8 rotary vane pump pumping speed 2.2L/S 2. Ultimate vacuum: 10Pa (including KF25 interface, high vacuum baffle valve and movable cabinet) 3. Digital display vacuum gauge, real-time display of vacuum, vacuum Display range: 1×105--1×10-1pa |
| Mixing system |
Three-way precision mass flow meter: digital display, automatic control of gas flow. MFC1 range: 0~500 sccm (optional) MFC2 range: 0~500 sccm (optional) MFC3 range: 0~500 sccm (optional) Air circuit: 3 channels Flow accuracy: 0.2% Inlet and outlet ports: 1 Each gas path of the /4" ferrule has an independent stainless steel needle valve control. The gas flow is adjusted by the knob on the control panel. |
| After-sales service | One year warranty and lifetime warranty (except vulnerable parts) |
