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  • 1700℃ Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive


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    Specific Introduction:
        KJ-1700X-F3LV tube furnace is a CE certified  alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat the samples to 1700°C and achieve vacuum degree up to 5x10-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gasses.
    Tube Furnace Structure
    • Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55°C.
    • High purity fibrous alumina insulation for Maximum energy saving.
    Power Consumption 5kW Max.
    Input Voltage AC 208~240V, Single Phase, 50/60Hz
    Max. Heating Temp. 1700°C
    Max. Heating Rate 5°C/min
    Max. Cooling Rate 5°C/min
    Heating Zone Length 455mm (18")
    Constant Temp. Zone 150(+/-1C)
    Temperature Accuracy +/-1°C
    Temperature Controller
    • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
    • Over temperature protection and alarm allows for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
      • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.
      • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD.
    Heating Elements 1800 grade MoSi2   ( 8 pcs )
    Tube Materials and Size
    • 99.8% high purity Al2O3 ceramic tube
    • ID: 73mm x  OD: 80 mm   x 1000 mm length.    
    Digital Vacuum Gauge 
    • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gasses.
    • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
    Vacuum Sealing
    • Two stainless steel flanges with a digital vacuum gauge and valves are included.
    • Vacuum pressure can reach 5x10-2 torr via the mechanical pump.
    • The leaking rate is 6 mtorr/min in max. and 2 mtorr/min when stable, get details chart and data measured by CE certificated digital vacuum meter:  
    Vacuum Pump and fittings Vacuum Pump
    • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure can reach up to 10^-2 Torr. 
    • The max. vacuum pressure in the alumina tube furnace is 5x10^-2 torr by using this vacuum mechanical pump. 
    Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
    Fittings The standard vacuum fittings include:
    • A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" Swagelok tube connector.
    • A 1000mm long KF-25 stainless steel vacuum bellows
    • Four KF-25 quick clamps
    Gas Flow Meter
    • Three gas flowmeters ( 4% accuracy FS) are installed inside mobile case provide  a monitor to gas flowing rates.
      • 1) Compact direct read flow meter, 10-100 cc/min.
      • 2) Compact direct read flow meter, 16-160 cc/min.
      • 3) Compact direct read flow meter, 25-250 cc/min. 
    • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
    • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
    Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
    Shipping Info Product Dimensions
    • 80 mm O.D Tube Furnace:    550 x 500 x 700mm L x W x H 
    • Gas Mix Station: 600 x 600 x 700mm
    • Vacuum station: 600 x 600 x 700mm
    New weight 450 lb (in total)
    Shipping weight and Dimensions Three pallets: 220 lbs with 48x40x42", 200 lbs eith 39x31x40: and 180lbs with 39x31x40" dimension.
    Warranty One year limited warranty (Consumable parts such as processing tubes, O-rings, and heating elements
    are not covered by the warranty, please order the replacement at related products page.)

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