Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>

Position:Home > Products > CVD/PECVD System > CVD Furnace System
1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump
  • 1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump
  • 1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump
  • 1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump
  • 1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump
  • 1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump



    KJ-1200X-80-III is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion.

    Specific Introduction:
        KJ-1200X-80-III  is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
    Furnace Construction
    • Double layer steel casing with air cooling
    • High purity alumina fiber insulation for max. energy saving
    • Splitable cover for easy tube replacement
    Power Consumption 5 KW
    Input Voltage AC 208-240V Single Phase, 50 or 60 Hz 
    Maximum Temperature 1200 oC
    ContinuousTemperature 1100 oC
    Maximum Heating Rate <= 20 oC /min
    Heating Zone Length
    • Three zones: (880mm, 35" in total)
      • Zone 1: 220mm  (8.6" )
      • Zone 2: 440mm  (17.3")
      • Zone 3: 220 mm (8.6")
    Constant Temperature Zone
    • If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC.
    • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC.
    Temperature Accuracy +/- 1oC
    Heating Elements Fe-Cr-Al Alloy doped by Mo
    Temperature Controller
    • Three precision temperature controllers to control three zones separately.
    • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    • Built in overheating & broken thermocouple protection.
    • Over temperature protection and alarm allows for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • RS485 Communications Port.
    • Optional:
      • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost. 
      • The new version of PC module is now compatible with Lab View 05/08/2014
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems.     
    Quartz Tube& Sealing Flanges 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included.
    Vacuum flanges with valves and pressure gauge are included. 
    Thermal block must be placed inside tube.
    Vacuum Sensor & Display
    • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
    • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
    Sliding Flange with Sample Holder
    • Slide for transferring sample (manual operated)
    Vacuum Sealing Flanges
    • Two stainless steel flanges with both vacuum gauge and valves included.
    • Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr by using mechanical + moleculer pump.
    • Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.
    Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
    Vacuum Pump
    120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace.
    Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
    Gas Flow Meter and Pressure Meter

    • Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).
      •  Compact direct read flow meter, 10-100 cc/min.
      •  Compact direct read flow meter, 16-160 cc/min.
      •  Compact direct read flow meter, 25-250 cc/min.
    • Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
    Valves Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately
    Dimensions Furnace: 1100 X 450 x 670 mm
    Bottom Mobile case: 600x600x597 mm
    Shipping Weight  850 Lbs
    Shipping Dimensions Total Three Pallets
    #1: 60" x 45" x 40"
    #2: 48" x 40" x 42"
    #3: 48" x 40" x 42"
    Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).
    • CE Certified
    • UL / MET / CSA Certification is available upon request, additional charges will apply
    • Temperature controller is MET and CE Certified                      


    Please leave a message here. We will reply you in 24 hours.

    Relate Customer Case

    Tel Number