KJ-1200X-80-III is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion.
|Power Consumption||5 KW|
|Input Voltage||AC 208-240V Single Phase, 50 or 60 Hz|
|Maximum Temperature||1200 oC|
|Maximum Heating Rate||<= 20 oC /min|
|Heating Zone Length||
|Constant Temperature Zone||
|Temperature Accuracy||+/- 1oC|
|Heating Elements||Fe-Cr-Al Alloy doped by Mo|
|Quartz Tube& Sealing Flanges||
80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included.
Vacuum flanges with valves and pressure gauge are included.
Thermal block must be placed inside tube.
|Vacuum Sensor & Display||
|Sliding Flange with Sample Holder||
|Vacuum Sealing Flanges||
|Oxygen Monitoring||An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.|
120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace.
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Gas Flow Meter and Pressure Meter
|Valves||Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately|
Furnace: 1100 X 450 x 670 mm
Bottom Mobile case: 600x600x597 mm
|Shipping Weight||850 Lbs|
Total Three Pallets
#1: 60" x 45" x 40"
#2: 48" x 40" x 42"
#3: 48" x 40" x 42"
|Warranty||One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).|