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Customized fluidized bed CVD system
  • Customized fluidized bed CVD system
  • Customized fluidized bed CVD system
  • Customized fluidized bed CVD system
  • Customized fluidized bed CVD system
  • Customized fluidized bed CVD system



    Mainly used in the research of chemical vapor deposition preparation process of ultra-high melting point coatings such as materials and composite carbides.

    Product introduction:
      The system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, SCR control, the furnace is made of alumina polycrystalline fiber material, and the two ends of the furnace tube are used The stainless steel flange is sealed. The stainless steel flange is equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.

    Structural composition:
      customized fluidized bed CVD system, composed of vacuum vertical tube furnace, gas supply system, vacuum system, and vacuum measurement system. 

    Technical parameter:

    product name Customized fluidized bed CVD system
    Product number KJ-CVD-DZ
    Vertical tube furnace
    Furnace mode Vertical open type
    Furnace material Imported alumina refractory fiber
    Heating element High quality silicon carbide rod
    Limit temperature 1400°C
    Operating temperature ≤1300℃
    Heating rate ≤20℃ (recommendation: 15℃/min)
    Heating temperature zone Single temperature zone, multiple temperature zone
    Total length of temperature zone 200, 300, 440
    Furnace tube material High purity quartz tube, corundum tube
    Tube diameter 40, 50, 60, 80, 100mm...
    Sealing method A set of 304 stainless steel vacuum flange (including sealing silicone ring)  
    Control mode Multi-segment intelligent PID program temperature control, reserved communication interface
    Temperature control accuracy ±1℃
    Temperature curve Multi-segment "time-temperature curve" can be set arbitrarily
    Temperature measuring element K-type thermocouple
    Pneumatic system
    Operating Voltage 220V/50HZ
    Maximum output power 18W
    Operating temperature 5--45℃
    Gas channel Multiple air sources can be connected at the same time
    Flowmeter Mass flowmeter
    Range A   0~500SCCM
    Range B  0~500SCCM
    C-channel range   0~500SCCM
    .....  .....
    Air pressure -0.1~0.15 MPa
    Shut-off valve Stainless steel material
    Gas connection pipe 1/4 stainless steel tube
    Digital display vacuum gauge and connecting parts
    Digital display vacuum gauge   Digital display vacuum gauge installed on stainless steel flange
          Vacuum pump set (related connection accessories)
    Vacuum pump Vacuum pump and corresponding connecting pipe 220V/50HZ
    After-sales service One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

    CVD system,


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