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  • Customized fluidized bed CVD system

    Model:KJ-CVD-DZ

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Product introduction:
      The system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, SCR control, the furnace is made of alumina polycrystalline fiber material, and the two ends of the furnace tube are used The stainless steel flange is sealed. The stainless steel flange is equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.
    Structural composition:
      customized fluidized bed CVD system, composed of vacuum vertical tube furnace, gas supply system, vacuum system, and vacuum measurement system. 
    technical parameter:

    product name

    Customized fluidized bed CVD system

    Product number

    KJ-CVD-DZ

    Vertical tube furnace

    Furnace mode

    Vertical open type

    Furnace material

    Imported alumina refractory fiber

    Heating element

    High quality silicon carbide rod

    Limit temperature

    1400°C

    Operating temperature

    ≤1300℃

    Heating rate

    ≤20℃ (recommendation: 15℃/min)

    Heating temperature zone

    Single temperature zone, multiple temperature zone

    Total length of temperature zone

    200, 300, 440

    Furnace tube material

    High purity quartz tube, corundum tube

    Tube diameter

    40, 50, 60, 80, 100mm...

    Sealing method

    A set of 304 stainless steel vacuum flange (including sealing silicone ring)  

    Control mode

    Multi-segment intelligent PID program temperature control, reserved communication interface

    Temperature control accuracy

    ±1℃

    Temperature curve

    Multi-segment "time-temperature curve" can be set arbitrarily

    Temperature measuring element

    K-type thermocouple

    Pneumatic system

    Operating Voltage

    220V/50HZ

    Maximum output power

    18W

    Operating temperature

    5--45℃

    Gas channel

    Multiple air sources can be connected at the same time

    Flowmeter

    Mass flowmeter

    Range A  

    0~500SCCM

    Range B 

    0~500SCCM

    C-channel range  

    0~500SCCM

    .....

     .....

    Air pressure

    -0.1~0.15 MPa

    Shut-off valve

    Stainless steel material

    Gas connection pipe

    1/4 stainless steel tube

    Digital display vacuum gauge and connecting parts

    Digital display vacuum gauge  

    Digital display vacuum gauge installed on stainless steel flange

          Vacuum pump set (related connection accessories)

    Vacuum pump

    Vacuum pump and corresponding connecting pipe 220V/50HZ

    Certification

    ISO certification, CE certification

    After-sales service

    One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

     
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan