Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>

Position:Home > Products > CVD/PECVD System > PECVD Furnace System
Automatic Rotary Tilt Tube PECVD System
  • Automatic Rotary Tilt Tube PECVD System
  • Automatic Rotary Tilt Tube PECVD System
  • Automatic Rotary Tilt Tube PECVD System
  • Automatic Rotary Tilt Tube PECVD System
  • Automatic Rotary Tilt Tube PECVD System



    The KJ-TPECVD1100-S80CK3 Automatic Rotary Tilt Tube PECVD System is used to handle metal powder coating process. It features functions for fully automatic swivel and tilt.

    Product name Automatic Rotary Tilt Tube PECVD System (CE Cert)
    Rotary Tube Furnace Part
    Model KJ-TPECVD1100-S80CK3
    Heating zone length 660mm(220+220+220mm Three temperature zone)
    Constant temperature zone length 400mm
    Furnace tube material High-purity quartz tube (reducing tube)
    Furnace tube size  Reducer
    Dimensions at both ends OD: 80mm* 400mm
    Middle size OD: 150mm* 400mm
    The total length is 1200mm, the middle part of the furnace tube is welded with the lifting plate
    Working temperature ≦1100℃
    Max.temperature 1200℃
    Temperature measuring element 3 K-type thermocouples for temperature control
    Temperature Control System 7-inch touch screen display, 16-segment storable curves, 30-segment PID microcomputer programmable automatic control, can store and copy data
    Insulation temperature control accuracy ±1℃
    temperature protection With over temperature and burnout protection function
    Heating rate 0-20ºC/min
    Heating element Alloy resistance wire
    Operating Voltage AC 220V single-phase 50HZ
    Maximum power 5KW(subject to actual power )
    Furnace chamber material Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field
    sealing system The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness.
    Flange Water-cooled sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials
    inclined structure Can be tilted with an inclination angle of 0-15° (adjustable inclination angle) to facilitate material in and out
    rotating structure Can rotate 360 degrees, speed 0-15 revolutions (speed adjustable)
    The material is evenly heated in the furnace
    Furnace shell temperature ≤45℃
    vacuum system part
    Name Molecular pump set
    pump set Rotary vane pump + molecular pump
    The main parameters The ultimate vacuum is 6.7*10-3Pa (including KF25 interface, vacuum baffle valve and movable box)
    vacuum display Imported capacitive diaphragm vacuum gauge, corrosion-resistant, real-time display of vacuum degree
    Vacuum display range Its measuring range is 1×105--1×10-5pa
    rotary seal Magnetic fluid seal to ensure that vacuum can be pumped during rotation
    Air system part
    Name Three-way mass flow meter
    Gas line Three-way 
    flow control LCD touch screen control, digital display, each gas contains separate needle valve control, automatic gas flow control
    Air inlet and outlet Three in and one out, built-in precision mixing tank
    link method Double Ferrule Fitting
    flow range MFC1-MFC3: 0-10SLM (range optional)
    control precision About ±1.5%F.S, different ranges, slightly different
    maximum withstand voltage 1.1Mpa
    Working temperature 5℃-45℃
    Plasma radio frequency part
    Name RF automatic matcher
    Model VERG-500+VENA-500
    Matching power range 0-500W
    working frequency 13.56MHZ+0.005%
    Normal working reflected power <3W
    match time <3S
    transmission efficiency >90%
    Use stability ±1%F.S
    Matching power supply AC220V/50-60HZ
    input connector N type
    output connector UHF
    control mode Manual / Auto
    Preset points can be set 7
    Matching Impedance Range Real part 0-80Ω Imaginary part-j200-j200 (impedance can be adjusted according to load)
    Matching size 340X230X130 MM
    Provide related accessories 1 set of gas circuit, 1 set of radio frequency power supply, 1 set of vacuum pump group, 2 furnace plugs, 1 pair of sealing flanges, 1 piece of quartz tube, 2 pairs of sealing rings, 1 pair of high-temperature gloves, 1 piece of crucible hook, 1 piece of vacuum pump connecting pipe fittings Set, 1 hex wrench for disassembling the flange, 1 copy of warranty card manual, etc.

    rotary pecvd tube furnace

    pecvd rotary furnace


    Please leave a message here. We will reply you in 24 hours.

    Relate Customer Case

    Tel Number