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Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
  • Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
  • Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
  • Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
  • Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
  • Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD

    Model:KJ-1200X-III-HVC

    Description:

    The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 12

    Specific Introduction:
        The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.

    Parameters:

    OTF-1200X-III series tube furnace


     

    Casing

    Double-layer steel casing with air cooling.
    Built-in thermostat to control Cooling running automatically when case > 55°C.

    Processing Tube

    Material: Fused quartz tube
    One processing tube is included with the furnace.
    Please select the tube size in the option bar to update the price.

    Power

    7KW

    Rated Voltage

    AC 208-240V Single phase, 50/60Hz

    Heating Element

    Fe-Cr-Al Alloy doped by Mo

    Working Temp.

    Max. Heating Temp.: 1200°C
    Continuous Working Temp.: 1100°C

    Heat-up Rate

    Heat-up rate: 1~20°C/min programmable

    Heating Zone Length

    Total heating zone: 900mm   (300mm + 300mm + 300mm)

    Temp. Controller

    • Three precision temperature controllers to control three zones separately.

    • PID automatic control with 30 steps programmable segments.

    • Temperature accuracy: ±1°C

    • Thermocouple: K type built inside the furnace

    Vacuum Seal

    One pair of stainless steel vacuum flange with:
    - one mechanical pressure gauge
    - two needle valves
    - one KF-40 connector for the high vacuum station.

    Rated Voltage

    AC 208-240V Single Phase, 50/60Hz

    Dimension

    1100(L) x 450(W) x 670(H), mm

    High Vacuum Station

    Structure

    Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
    Max. Loading:       600 Lbs on top
    Molecular pump control Panel:   LCD digital
    Inside:   Pfeiffer vacuum pump  made in Germany
    Vacuum sensor is included

    Volume Flow Rate

    Nitrogen   N2     33 L/s
    Helium     He     39 L/s   (2340L/minute)
    Hydrogen H2   32 L/s

    Working Range

    From 1000 mbar to <1E-7 mbar

    Ultimate Pressure

    <1E-8 mbar (without any leaking )

    Voltage & Power

    110VAC or 220VAC, 110W

    Mass Flow Gas Control

    Structure

    • 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software

    • LED display

    • 4 channel MFC Made of 316 stainless steel with gas flow range as below:

      • Controller 1: 0~100SCCM

      • Controller 2: 1~199 SCCM

      • Controller 3: 1~199 SCCM

      • Controller 4: 1~499 SCCM

    • 4 Channel gas go through a Gas mixing tank: Φ80X120mm  

    • Dimension: 600(L) x 745(W) x 700(H), mm

    Power

    18W

    Rated Voltage

    AC 208-240V, Single phase, 50/60Hz

    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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