KJ-1200X-4-III is CE certified 4" diameter split three-zone tube furnace with vacuum pump system (up to 10-4 torr) and 9 channel PLC Touch Panel precision digital Mass flow meters Gas Control System, which can control nine types of gases for CVD or diffus
Double-layer steel casing with air cooling.
High purity alumina fiberboard liner for energy cost-effective operation.
Three heating zones with three independent temperature controllers.
Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
|Heating Element||Fe-Cr-Al Alloy doped by Mo|
|Max. Heating Temp.||1200°C|
|Continuous Heating Temp.||1100°C|
|Max. Heating Rate||<=20°C/min|
|Heating Zone Length||
Three zones: (880mm, 35" in total)
Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
|Constant Temp. Zone||20" (500 mm) length (three zones at equal temperature within +/- 1°C)|
|Tube Size and Materials||
Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.
PID adjustable with auto tune function to ensure temperature stability within +/ - 1 oC.
Full protection in each controller for over-temperature and broken thermal couple.
|Thermocouple||Three K-type thermocouples|
|Power Input||AC 208~240V, Single Phase, 50/60Hz, 7KW max.|
The Standard vacuum accessories include:
High Vacuum Station
Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel: LCD digital
Inside: Pfeiffer vacuum pump
Vacuum sensor is included
The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
|Volume Flow Rate||
Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
|Working Range||From 1000 mbar to <1E-7 mbar|
|Ultimate Pressure||10^-5 torr (with tube furnace)|
|Power Input||110V AC or 220V AC switchable, 50/60Hz|
|Power consumption||Duration/Max power: 100/110Watt|
Mass Flow Controller
9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale.
|Gas Pipe Connect||
Furnace: 550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station: 600 x 600 x 700mm
Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
|Warranty||One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products page.)|