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  • Single-zone Tube Furnace with High Vacuum & 3 Channel Precision Gas Flow Station for CVD


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        The KJ-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

    OTF-1200X series tube furnace
    • Double-layer steel casing with air cooling.
    • Built-in thermostat to control Cooling running automatically when case > 55°C.
    Processing Tube Material: Fused quartz tube
    One processing tube is included with the furnace.
    Please contact us to specify the tube diameter. 
    Power 2.5KW
    Rated Voltage AC 208-240V Single phase, 50/60Hz
    Heating Element Fe-Cr-Al Alloy doped by Mo
    Working Temp. Max. Heating Temp.: 1200°C
    Continuous Working Temp.: 1100°C
    Heat-up Rate Heat-up rate: 1~20°C/min programmable
    Heating Zone Length Total heating zone: 440mm
    Constant Temp. Zone: 150mm (±1°C)

    Temp. Control
    • PID automatic control with 30 steps programmable segments.
    • Temperature accuracy: ±1°C
    • Thermocouple: K type built inside the furnace

    Vacuum Seal
    • One pair of stainless steel vacuum flange with:
      •  one mechanical pressure gauge
      •  two needle valves 
      • one KF-25 connector for the high vacuum station.
    Power 100~110W
    Rated Voltage AC 208-240V Single Phase, 50/60Hz

    High Vacuum Station

    Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
    Max. Loading:       600 Lbs on top
    Molecular pump control Panel:   LCD digital
    Inside:   Pfeiffer vacuum pump 
    Vacuum sensor is included

    Volume Flow Rate
    Nitrogen   N2     33 L/s
    Helium      He     39 L/s   (2340L/minute)
    Hydrogen H2   32 L/s
    Working Range From 1000 mbar to <1E-7 mbar
    Ultimate Pressure <1E-8 mbar (without any leaking )

    Mass Flow Gas Control
    Structure Made of 316 stainless steel valve
    Gas mixing tank: Φ80X120mm  
    600mm(L) x 745mm(W) x 700mm(H)
    6" color touch screen control panel to make parameter setting at easy.
    Touchscreen Control and PC remote switchable.
    Power 23W per channel
    Rated Voltage AC 220V/50Hz Single phase
    Temperature Controller
    • Temperature controller is included.
    • Proportional–integral–derivative control (PID control) and auto-tune function
    • 30 segments programmed with ramping, cooling and dwelling steps
    • Built-in over-temperature alarm and thermocouple failure alarm
    • +/- 1 ºC temperature control accuracy
    • Default DB9 PC communication port
    Temperature controller (optional)
    • Temperature control software kit + 15" laptop package is available at the options bar.
    • You may upgrade the temperature controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD.
    Optional 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software is available upon request at extra cost
    • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
    • The flow rate for gases should be limited to < 200 ml/min for reducing thermal shocks to the tube
    • Vacuum pressures may only be safely used up to 1000°C 
    Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products page.)

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