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  • 1200℃ Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-S-50 is  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
    Furnace Structure
    • Both furnaces are double layer steel structure with 1200°C max. working temperature
    • Each Furnace has 200mm heating zone and 60 mm long constant temperature zone
    • One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side with max sliding distance 400 mm.
    • Vacuum flanges is installed  for immediate use.
    Power of furnace  2.5 KW in total
    Voltage  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
    Max. Temperature 1200°C (<1 hour)
    Continuous Temperature 1100°C
    Heating & Cooling Rates Note:
    The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.
    Heating Zone Length 200mm( ~8")  for each furnace
    Constant Temperature Zone 60 mm (+/-1°C @ 400-1200°C)
    Heating Elements Fe-Cr-Al Alloy doped by Mo
    Processing Tube Size High purity fused quartz tube
    Size:  50mm O.D x 44mm I.D x1400 mm Length 
    Temperature Controller
    • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    • Built-in over temperature alarm and protection allows for operation without an attendant.
    • Two K-type thermal couples are included. 
    • Optional:
      • The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. 
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. 
    Temperature Accuracy +/ - 1°C
     Vacuum Flanges
    • Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. 
    • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.
     Sliding Rails / Table
    • Double sliding rail made by Cr-plated steel
    • Sliding length: 1200 mm
    • Two slide stopping clamps are included for holding the position of the furnaces.
     Vacuum Level 
    • Limited by pump ( pump is not included )
      • 10E-5 torr can be achieved via molecular pump
      • 10E-2 torr can be achieved via a mechanical pump.
    Optional for upgrate
    • Motorized sliding is available upon request
    • 1-9 chaanel gas mixing and delivery moudles is availle
    • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request
    • Furnace: 340 x 300 x 400 mm
    • Total:1600 x 430 x 500 mm ( furnaces + sliding )
     Net Weight ~ 80 Kg
    Shipping Package Size 70" x 45" x 45" (inch)
    Shipping Weight 300 lbs
    Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).

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