1200℃ Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD

Model：KJ-1200X-S-50

Description：

KJ-1200X-S-50 is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source

Specific Introduction:
KJ-1200X-S-50 is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
Parameters:

Furnace Structure	Both furnaces are double layer steel structure with 1200°C max. working temperature Each Furnace has 200mm heating zone and 60 mm long constant temperature zone One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side with max sliding distance 400 mm. Vacuum flanges is installed for immediate use.
Power of furnace	2.5 KW in total
Voltage	AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
Max. Temperature	1200°C (<1 hour)
Continuous Temperature	1100°C
Heating & Cooling Rates	Note: The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.
Heating Zone Length	200mm( ~8") for each furnace
Constant Temperature Zone	60 mm (+/-1°C @ 400-1200°C)
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Processing Tube Size	High purity fused quartz tube Size: 50mm O.D x 44mm I.D x1400 mm Length
Temperature Controller	Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in over temperature alarm and protection allows for operation without an attendant. Two K-type thermal couples are included. Optional: The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems.
Temperature Accuracy	+/ - 1°C
Vacuum Flanges	Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.
Sliding Rails / Table	Double sliding rail made by Cr-plated steel Sliding length: 1200 mm Two slide stopping clamps are included for holding the position of the furnaces.
Vacuum Level	Limited by pump ( pump is not included ) 10E-5 torr can be achieved via molecular pump 10E-2 torr can be achieved via a mechanical pump.
Optional for upgrate	Motorized sliding is available upon request 1-9 chaanel gas mixing and delivery moudles is availle 100W - 500W RF plasma generator for plasma enhanced processing is available upon request
Dimensions	Furnace: 340 x 300 x 400 mm Total:1600 x 430 x 500 mm ( furnaces + sliding )
Net Weight	~ 80 Kg
Shipping Package Size	70" x 45" x 45" (inch)
Shipping Weight	300 lbs
Warranty	One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).