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Position:
E-mail:
Tell:
Whatapp:
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Specific Introduction:
KJ-1200X-S-50 is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
Parameters:
KJ-1200X-S-50 is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
Parameters:
| Furnace Structure |
|
| Power of furnace | 2.5 KW in total |
| Voltage | AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required |
| Max. Temperature | 1200°C (<1 hour) |
| Continuous Temperature | 1100°C |
| Heating & Cooling Rates |
Note: The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not. |
| Heating Zone Length | 200mm( ~8") for each furnace |
| Constant Temperature Zone | 60 mm (+/-1°C @ 400-1200°C) |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
| Processing Tube Size |
High purity fused quartz tube Size: 50mm O.D x 44mm I.D x1400 mm Length |
| Temperature Controller |
|
| Temperature Accuracy | +/ - 1°C |
| Vacuum Flanges |
|
| Sliding Rails / Table |
|
| Vacuum Level |
|
| Optional for upgrate |
|
| Dimensions |
|
| Net Weight | ~ 80 Kg |
| Shipping Package Size | 70" x 45" x 45" (inch) |
| Shipping Weight | 300 lbs |
| Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page). |
