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  • Touch Screen 3 Zones Tube Furnace

    Model:

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Product Description:
         KJ-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
    Technical Parameter:

    Model 

    KJ-T1200 CVD with 3 MFC Gas channels

    Display

    LED

    Max. Temperature

    1200℃ for short time

    Continuous Working Temp.

    ≤1100℃

    Heating Rate

    Suggestion: 0~10℃/min

    Temperature Zone

    220mm+220mm+220mm

    Heating Element

    Resistance Wire With Mo

    Thermocouple

    K Type

    Temperature Control Accuracy

    ±1℃

    Tube Size

    80x1200mm (OD x L)

    Tube Block

    Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).

    Temperature Control

    PID automatic control via SCR power control

    Program and Ramps

    30 steps programmable

    Vacuum Flange

    Stainless Steel vacuum flange with valves

    Power

    220V, 50 Hz, single phase at max.6KW

    Mass Flow Meters

    Three precision mass flow meters :

    MFC 1: Gas flow range from 0~100 sccm

    MFC 2: Gas flow range from 0~200 sccm

    MFC 3: Gas flow range from 0~200 sccm

    (Gas flow range can be according to your requirement)

    One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually

     

    Below photo is 4 MFC for reference. 3 MFC will be with 3 displays

    PEVCD


    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan