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  • 1600℃ Chemical Vapor Deposition CVD System

    Model:KJ-T1600-S6044-LK-Z

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Range of Application:
        CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc. in laboratories, other research institutes and enterprises.
     
    Parameters:

    Product name

    1600℃ Chemical Vapor Deposition CVD System

    Model

    KJ-T1600-S6044-LK-Z

    Tube Furnace

    Structure

    Non-split type

     

    Insulation layer

    Alumina ceramic fiber

     

    Max. Temperature

    1600℃

     

    Working Temperature

    ≤1500℃

     

    Heating Rate

    20℃/min (Suggestion 10℃/min)

     

    Heating Zone Length

    300mm (Single Zone)

     

    Heating Element

    Silicon Molybdenum MoSi2 Heating Rods

     

    Temperature Sensor

    B-type thermocouple

     

    Temperature Control Accuracy

    ±1℃

     

    Tube

    Alumina ceramic tube

    Φ50, 60, 80mm available

     

    Temperature Controller

    PID automatic control with 30 programmable segments for precise control

    Easy-operation touchscreen control is available.

     

    Sealing

    Flanges made of 304SS

    Gas valve on left flange

    Vacuum angle valve with KF25 connector on the right flange

    Note: Standard flange, KF flange and hinge flange are available.

     

    Power Supply

    Single phase, 220V, 50Hz.

     

    Power

    Power 5kW

    Vacuum pump unit

    Vacuum pump

    (With movable box)

    10pa with a mechanical vacuum pump

    0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.

     

    Pressure Gauge

    Digital Pressure Gauge with high accuracy

    Measurement Range 1×105--1×10-5Pa

    Gas-Mixing Unit with mass flow meters

    Four precise mass flow meters (0.02% accuracy) with LED displays are installed on the front panel to control gas flow rate manually.

    One gas mixing tank is installed on the bottom case.

    MFC 1: Gas flow range from 0~100 SCCM

    MFC 2: Control range from 0~200 SCCM  

    MFC 3: Control range from 0~500 SCCM

    MFC 4: Control range from 0~500 SCCM

    Gas inlet fitting: four 1/4NPS.

    Gas outlet fitting: four 1/4NPS.

    Power: 185-220VAC 50/60Hz

    5 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.

    Chiller (Optional)

    Be used to cool the tube and vacuum pump.

    Notes

    Pressure higher than 1.02Mpa will break the tube.

    Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

    No vacuum condition is allowed when the temperature is higher than 1000℃.

    Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

    If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.

    Warranty

    One year with lifetime technical support.


    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan