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1200℃ Chemical Vapor Deposition CVD System
  • 1200℃ Chemical Vapor Deposition CVD System
  • 1200℃ Chemical Vapor Deposition CVD System
  • 1200℃ Chemical Vapor Deposition CVD System
  • 1200℃ Chemical Vapor Deposition CVD System
  • 1200℃ Chemical Vapor Deposition CVD System

    Model:KJ-T1200-S6044-LK-Z

    Description:

    KJ-T1200-S6044-LK-Z CVD System With High Vacuum Degree consists of a 60mm-daimeter 1200℃ tube furnace, a four-channel gas-mixing unit with mass flow meters, and a vacuum pump unit.

    Range of Application:
        CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc. in laboratories, other research institutes and enterprises.
     
    Parameters:
    Product name 1200℃ Chemical Vapor Deposition CVD System
    Model KJ-T1200-S6044-LK-Z
    Tube Furnace Structure Non-split type
      Insulation layer Alumina ceramic fiber
      Max. Temperature 1200℃
      Working Temperature ≤1100℃
      Heating Rate 20℃/min (Suggestion 10℃/min)
      Heating Zone Length 300mm (Single Zone)
      Heating Element Electric wire with
      Temperature Sensor K-type thermocouple
      Temperature Control Accuracy ±1℃
      Tube Alumina ceramic tube

    Φ50, 60, 80mm available
      Temperature Controller PID automatic control with 30 programmable segments for precise control

    Easy-operation touchscreen control is available.
      Sealing Flanges made of 304SS

    Gas valve on left flange

    Vacuum angle valve with KF25 connector on the right flange

    Note: Standard flange, KF flange and hinge flange are available.
      Power Supply Single phase, 220V, 50Hz.
      Power Power 5kW
    Vacuum pump unit Vacuum pump

    (With movable box)
    10pa with a mechanical vacuum pump
      Pressure Gauge Digital Pressure Gauge with high accuracy

    Measurement Range 1×105--1×10-5Pa
    Gas-Mixing Unit with mass flow meters Four precise mass flow meters (0.02% accuracy) with LED displays are installed on the front panel to control gas flow rate manually.

    One gas mixing tank is installed on the bottom case.

    MFC 1: Gas flow range from 0~100 SCCM

    MFC 2: Control range from 0~200 SCCM  

    Gas inlet fitting: four 1/4NPS.

    Gas outlet fitting: four 1/4NPS.

    Power: 185-220VAC 50/60Hz

    Stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
    Chiller (Optional) Be used to cool the tube and vacuum pump.
    Notes Pressure higher than 1.02Mpa will break the tube.

    Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

    No vacuum condition is allowed when the temperature is higher than 1000℃.

    Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

    If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
    Warranty One year with lifetime technical support.

    Inquiry

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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