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1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System



    1400℃ Three-Zone CVD System comprises a KJ-T1400 three-zone tube furnace, a three-channel gas-mixing unit with mass flow meters and a set of vacuum pumps.

    Specific Introduction:
        The top temperature of this system is 1400℃, the ultra vacuum degree is 10-3torr. The gas-mixing system will mix the gas precisely and lead it into the tube furnace.

    Product name 1400℃ Three-Zone CVD System
    Model  KJ-T1400-L6030-LC3
    Tube Furnace Max. Temperature 1400℃
      Working Temperature ≤1300℃
      Heating Rate 20℃/min (Suggestion 10℃/min)
      Heating Zone Length 200+200+200mm
      Heating Element Silicon Carbide SiC heating rods
      Temperature Sensor S-type thermocouple
      Temperature Control Accuracy ±1℃
      Tube Alumina ceramic tube
    Φ50, 60, 80mm available
      Temperature Controller PID, Intellectual, 30-segment programmable
      Sealing Flanges made of 304SS
    Gas valve on left flange
    Vacuum angle valve with KF25 connector on the right flange
    Note: Standard flange, KF flange and hinge flange are available.
      Power Single phase, 220V, 50Hz.
    Power 3kW
    Vacuum pump unit Vacuum pump Imported vacuum pump
      Pressure Gauge Digital Pressure Gauge with high accuracy
    Gas-Mixing Unit Manual Intellectual Control, Led screen.
    Each channel can be used for different gas.
    Measurement range: 0-500sccm adjustable.
    Four manually-controlled stainless steel valves installed on the left side, three inlets, one outlet.
    Connection: Ferrule screw.
    Chiller (Optional) Be used to cool the tube and vacuum pump.
    Notes Pressure higher than 1.02Mpa will break the tube.
    Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.
    No vacuum condition is allowed when the temperature is higher than 1000℃.
    Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.
    If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
    Warranty One year with lifetime technical support.


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