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1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System
  • 1400℃ Three-Zone CVD System

    Model:KJ-T1400-L6030-LC3

    Description:

    1400℃ Three-Zone CVD System comprises a KJ-T1400 three-zone tube furnace, a three-channel gas-mixing unit with mass flow meters and a set of vacuum pumps.

    Specific Introduction:
        The top temperature of this system is 1400℃, the ultra vacuum degree is 10-3torr. The gas-mixing system will mix the gas precisely and lead it into the tube furnace.

    parameters:

    Product name

    1400℃ Three-Zone CVD System

    Model

     KJ-T1400-L6030-LC3

    Tube Furnace

    Max. Temperature

    1400℃

     

    Working Temperature

    ≤1300℃

     

    Heating Rate

    20℃/min (Suggestion 10℃/min)

     

    Heating Zone Length

    200+200+200mm

     

    Heating Element

    Silicon Carbide SiC heating rods

     

    Temperature Sensor

    S-type thermocouple

     

    Temperature Control Accuracy

    ±1℃

     

    Tube

    Alumina ceramic tube

    Φ50, 60, 80mm available

     

    Temperature Controller

    PID, Intellectual, 30-segment programmable

     

    Sealing

    Flanges made of 304SS

    Gas valve on left flange

    Vacuum angle valve with KF25 connector on the right flange

    Note: Standard flange, KF flange and hinge flange are available.

     

    Power

    Single phase, 220V, 50Hz.

    Power 3kW

    Vacuum pump unit

    Vacuum pump

    Imported vacuum pump

    1.5*10-3Torr

     

    Pressure Gauge

    Digital Pressure Gauge with high accuracy

    Gas-Mixing Unit

    Manual Intellectual Control, Led screen.

    Each channel can be used for different gas.

    Measurement range: 0-500sccm adjustable.

    Four manually-controlled stainless steel valves installed on the left side, three inlets, one outlet.

    Connection: Ferrule screw.

    Chiller (Optional)

    Be used to cool the tube and vacuum pump.

    Notes

    Pressure higher than 1.02Mpa will break the tube.

    Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

    No vacuum condition is allowed when the temperature is higher than 1000℃.

    Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

    If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.

    Warranty

    One year with lifetime technical support.


    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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