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  • 1200℃ Max Single Zone Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-80 is a CE certified spiltable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3  types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
    Furnace Construction
    • Double layer steel casing with air cooling
    • Built-in thermostat automatically runs the cooling system when the case temp. > 55°C
    Power Consumption 2.5 KW
    Input Voltage AC 208-240V Single Phase, 50 or 60 Hz
    Maximum Temperature 1200 °C
    Continuous workingTemperature 1100 °C
    Maximum Heating Rate <= 20  oC /min
    Heating Zone Length 400 mm
    Constant Temperature Zone 150mm  (+/-1°C)
    Temperature Accuracy +/- 1°C
    Heating Elements Fe-Cr-Al Alloy doped by Mo
    Temperature Controllers
    • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
    • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
    • Over temperature protection and alarm allows for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • RS485 Communications Port.
      • Advanced Temperature Control (Optional)
      • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. 
      • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
    Tube Size and Materials Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm
    Digital Vacuum Gauge 
    • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases
    • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
    Vacuum Sealing Flanges Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. Click the picture below to get details of both chart and data measured by CE certified vacuum meter: 
    Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
    Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
    Vacuum Pump
    • 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4  torr
    • Stainless steel hose tube is included for connecting to tube furnace
    Gas Flow Meter and Pressure Meter
    • Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).
              1) Compact direct read flow meter, 10-100 cc/min
              2) Compact direct read flow meter, 16-160 cc/min
              3)Compact direct read flow meter, 25-250 cc/min

    • Four pressure meters are installed inside the mobile cart which is able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
    Valves Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately.
    • Furnace: 550 x 380 x 520 mm
    • Bottom Mobile case: 600 x 600 x 597 mm 
    Net Weight ~ 60 kg
    Shipping weight 200 lbs
    Shipping Dimensions Two cases in one pallet:  45" x 45" x 35" /case
    Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).

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