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  • Diffusion Oxidation Furnace

    Model:KJ-T1300D

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Product Description:
    Features:
    ●It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes
    ●Using high-reliability industrial control computer + PLC mode, automatic control of furnace temperature, advancing and retreating boat, gas flow, and valves are used to realize all process automation;
    ●With a friendly man-machine interface, users can easily modify the process control parameters, and can display various process status at any time;
    ●With a variety of process pipelines for users to choose conveniently;
    ●It has powerful software functions and is equipped with fault self-diagnosis software, which can greatly save maintenance time;
    ●Automatic adjustment of the constant temperature zone, cascade control, can accurately control the actual process temperature of the reaction tube;
    ●With over-temperature, broken couple, thermocouple short circuit, process gas flow deviation alarm and protection functions;
    ●Products can be customized according to user requirements.

    Technical index:
    ●Applicable chip size: 2~8 inch wafer
    ●Working temperature: 600℃~1300℃;
    ●The number of process tubes that can be equipped: 1~4 tubes/set
    ●Length and accuracy of constant temperature zone: ≤±0.5℃/600~800mm (800℃~1300℃),
    ● Single-point temperature stability: ≤±0.5℃℃ /24h (1100℃);
    ●Temperature ramp capability: the maximum heating rate is 20℃/min, the maximum cooling rate is 5℃/min;

    Application:
      Semiconductor integrated circuits, advanced packaging, power electronics (IGBT), micromachines (MEMS), photovoltaic cells (Photovoltaic) manufacturing and other fields, suitable for 2~8 inch process size diffusion, oxidation, annealing and alloy processes.
    Diffusion Oxidation Furnace
    Diffusion Oxidation Furnace

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    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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