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Roll to Roll CVD System for Continuous 2D Film Growth & Wire Annealing



KJ-1200X-III-RR is a lab-scale Roll to Roll graphene preparation tube furnace system, which contains 100mm O.D. three heating zone split tube furnace at 1200ºC Max. and two vacuum chambers with substrate reeling in and out, as well as a touch screen contr

Specific Introduction:
    KJ-1200X-III-RR is a lab-scale Roll to Roll graphene preparation tube furnace system, which contains 100mm O.D. three heating zone split tube furnace at 1200ºC Max. and two vacuum chambers with substrate reeling in and out, as well as a touch screen control panel. The R2R system is designed for exploring the flexibility to grow graphene or other CVD films continuously for the industry.
Three Heating Zone Tube Furnace

  • Input power: 220VAC, 50/60Hz, single phase at Max. 5KW
  • Heating element: Fe-Cr-Al Alloy doped by Mo
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max. working temperature for continuous heating
  • Recommended heating rate: ≤ 10ºC/min
  • High purity quartz tube: φ100 x 1400mm
  • Total three heating zone length: 600mm (150mm + 300mm + 150mm)
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection
  • Temperature accuracy: ±1ºC
R2R Vacuum Chambers
  • Two vacuum chambers are located in two ends of the furnace and connected with the quartz tube
  • The reeling rollers for a substrate in and out are located inside the vacuum chamber 
  • Reeling speed for the substrate is adjustable from 1- 400mm/min
  • One roll of copper foil with 80 mm width and 0.025 mm thick (~2 kg) is included for customer practice
  • The max vacuum pressure for the chamber: 5 x 10^-2 torr
Three Channel Gas Delivery Station (Optional)
  • Power: 220VAC, 50Hz, single-phase at Max. 23KW
  • Gas mixing tank: φ80 x 120mm
  • Working Temperature: 5~45ºC
  • Max. Pressure: 3 x 106 Pa
  • Accuracy: ±1.5% F.S.
  • Liner: ±(0.5-1.5)% F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 0~50 SCCM (Methane calibration)
    • Controller 2: 1~200 SCCM (H2 gas calibration)
    • Controller 3: 1~200 SCCM (Ar gas calibration)
  • Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking
Vacuum Pump and Valve
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.
  • KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve
  • Digital vacuum pressure gauge and display are installed with the furnace
  • The oil-less pump and gas mixing & delivery system are available and PID pressure controlled vacuum system is available upon request at an extra cost
Anti-corrosive Pressure Gauge
  • 3.8 x 10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
Temperature Controller
  • Three temperature controllers with 30 programmable segments with +/- 1ºC temperature accuracy
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection
  • Over-temperature protection and alarm allow for operation without attendant(s)
  • RS485 Communications Port with PC operation software
  • You may upgrade the temperature controller to the Eurotherm Controller with 0.1ºC accuracy with software
Control Panel
  • 7" touch screen control panel which will control temperature, gas flow rate, plasma power 
  • PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)
  • 2400mm L x 600mm W x 1400mm H
Warranty  One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products page.)
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