KJ-1700X-HVC is a CE-certified two-channel high-vacuum CVD system. It consists of a two-channel proton mixing system and a high-vacuum unit. Its maximum operating temperature can reach 1600℃, and the ultimate vacuum can reach to 10^ -5 torr.
|GSL-1700X series tube furnace||Casing||
Double layer steel casing with air cooling.
Two cooling fans inside to keep case temperature < 55°C.
High purity Alumina refractory chamber
Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Material: High Purity Alumina
One 60mm O.D. processing alumina tube is included with the furnace.
The furnace can be also custom made to fit the 50mm or 80mm O.D. processing alumina tube at an extra cost, please contact us for more information.
|Rated Voltage||AC 208-240V Single phase, 50/60Hz|
|Heating Element||8 pcs 1800°C grade MoSi2 heating element|
Max. Heating Temp.: 1650°C
Continuous Working Temp.: 1600°C
|Heating Zone Length||
Heating zone length: 457 mm (18")
Constant Temperature Zone length: 150 mm (6")(+/-1°C)
PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
Thermocouple: B type built inside the furnace
RS485 Communications Port.
One pair of stainless steel vacuum flange with:
- one mechanical vacuum gauge
- two needle valves
- one KF-25 connector and KF-25 to KF-40 adapter for the high vacuum station.
- one 1/4" Swagelok tube connector
|Dimension||550 x 380 x 520|
|High Vacuum Station||Rated Voltage||AC 208-240V Single Phase, 50/60Hz|
|Dimension||600(L) x 600(W) x 700(H), mm|
Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Inside: Pfeiffer vacuum pump
Vacuum sensor is included
One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
|Volume Flow Rate||
Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
|Working Range||From 1000 mbar to <1E-7 mbar|
|Ultimate Pressure||<1E-8 mbar (without any leaking )|
Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
The flow rate control range and number of gas routes are available for customization. Please contact us for detail information.
Mass Flow Gas Control
||Power||23W per channel|
|Rated Voltage||AC 220V/50Hz Single phase|
|Gas routes||Please select the number of gas routes in the optional bar to update the price|
|Warranty||One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products page.)|