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Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD
Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD

Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD

Model:KJ-1200X-III-HVC

Description:

The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C.

Detailed

Specific Introduction:
    The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.

Parameters:

OTF-1200X-III series tube furnace


 

Casing

Double-layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.

Processing Tube

Material: Fused quartz tube
One processing tube is included with the furnace.
Please select the tube size in the option bar to update the price.

Power

7KW

Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

Fe-Cr-Al Alloy doped by Mo

Working Temp.

Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C

Heat-up Rate

Heat-up rate: 1~20°C/min programmable

Heating Zone Length

Total heating zone: 900mm   (300mm + 300mm + 300mm)

Temp. Controller

  • Three precision temperature controllers to control three zones separately.

  • PID automatic control with 30 steps programmable segments.

  • Temperature accuracy: ±1°C

  • Thermocouple: K type built inside the furnace

Vacuum Seal

One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves
- one KF-40 connector for the high vacuum station.

Rated Voltage

AC 208-240V Single Phase, 50/60Hz

Dimension

1100(L) x 450(W) x 670(H), mm

High Vacuum Station

Structure

Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included

Volume Flow Rate

Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-8 mbar (without any leaking )

Voltage & Power

110VAC or 220VAC, 110W

Mass Flow Gas Control

Structure

  • 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software

  • LED display

  • 4 channel MFC Made of 316 stainless steel with gas flow range as below:

    • Controller 1: 0~100SCCM

    • Controller 2: 1~199 SCCM

    • Controller 3: 1~199 SCCM

    • Controller 4: 1~499 SCCM

  • 4 Channel gas go through a Gas mixing tank: Φ80X120mm  

  • Dimension: 600(L) x 745(W) x 700(H), mm

Power

18W

Rated Voltage

AC 208-240V, Single phase, 50/60Hz

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Contact Information
E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

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