Large diameter PECVD system_Zhengzhou Kejia Furnace

Large diameter PECVD system

Description：

The large diameter PECVD system ionizes the gas containing the film constituent atoms by radio frequency to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. This system is

Product introduction:
The large-diameter PECVD system uses radio frequency to ionize the gas containing the film constituent atoms to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. The system is extensive Used to deposit high-quality, SiO2 film, Si3N4 film, diamond film, hard film, optical film, carbon nanotube (CNT), graphene materials, etc.

Technical Parameters:

product name	Large diameter PECVD system
Slide rail tube furnace part
Product number	KJ-T1200-S200-4ZH-PE
Furnace tube size	Φ200mm*1200mm Can be customized according to customer needs
Furnace tube material	Quartz tube
Heating zone	400mm
Operating temperature	1100°C
Maximum temperature	1200°C
Temperature control method	N-type thermocouple
way to control	Touch screen control, you can adjust the angle of the temperature control screen according to actual use needs, making it more convenient to use
Temperature control accuracy	±1℃
Temperature control protection	With over-temperature and burnout protection function
Heating rate	0-20ºC/min, recommended 10ºC/min
Heating element	Molybdenum resistance wire
Furnace material	Alumina polycrystalline fiber
Flange joint	Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed
Sealing system	The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.
case	Stainless steel housing
Optional	Auxiliary cooling fan
Vacuum system part
name	Vacuum system
The main parameters	1. Using high vacuum molecular pump set, the ultimate vacuum can reach 10-3pa 2. KF25 quick connection, stainless steel bellows, manual baffle valve and flange, vacuum pump connection; 3. Digital vacuum display, its measurement range is 5 ×10-5-1500mbar, high measurement accuracy
Pneumatic system part
name	Four-way mass flow meter
The main parameters	Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range: 1. MFC 1-MFC4: 0-1000sccm adjustable 2. A gas mixing tank 3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases; 4. Air inlet and outlet: 3 In and out flow control: manual rotary adjustment connection mode: double ferrule connection
Plasma power supply part
name	500W plasma power supply
Power range	0-500W (continuously adjustable)
working frequency	13.56MHZ+0.005%
Operating mode	Continuous output
RF output impedance interface	N-type, female (50Ω)
Power protection settings	DC over-current protection, power amplifier over-temperature protection, reflected power protection
cooling method	Air-cooled
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)