Furnace Structure |
- The furnace consists of 16 small tube furnace modules with quartz tube 25 mm O.D. x 20 mm I.D. x 200 mm L
- Each heating module's temperature is controlled independently up to 1200°C
- Quick seal flange, vacuum gauge, and flow meter are installed to allows heat treatment under vacuum or flowing gas
- Processing 16 samples with different temperatures at compact space
- The furnace system consists of two units: a furnace heating modules and a power control unit
- The furnace can rock at variable speed
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Rocking Stage |
- 16 furnaces are driven by the heavy-duty motor to swing
- Rocking angle: -15º to +15º
- Rocking frequency: 50/min (25 cycles/min), 1 cycle is -15º to +15º
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Working Temperature |
- Continuous Working Temperature 1000°C
- Maximum Working Temperature 1100°C (< 1 hrs)
- Temperature accuracy: ±1 °C
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Processing Tubes & Flanges |
- 16 pieces of High purity Quartz tube with 25 mm O.D. x 20 mm I.D. x 200 mm L are included
- 16 pairs of SS304 Quickly clamped flange with 1/8 gas inlet and outlet, as well as vacuum ports are built-in
- 16 pairs of needle valves are designed for gas inlet and outlet for gas flow control
- 16 vacuum ports in the back could be connected to the vacuum pump via 16 to 1 adaptor
- Only one vacuum pump required via a KF25 port.
- Max. Vacuum 10^-2 torr by a mechanical pump and 10^-5 torr by turbopump
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Temperature Control |
- 16 channel heating tube is controlled independently by 30 segments programmable temperature controller
- 16 N-type Thermal Couples
- 6" Touch screen panel to set heating programs
- RS484 port is built-ing and software is optional for PC operation
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Heating Rate |
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Heating Element |
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Warning & Note |
- Max pressure of this furnace is 7.5 PSI (0.5 atm). You must install a pressure regulator on your gas tank to avoid over-pressured.
- This furnace also can be modified as a larger CVD furnace system with the proper gas delivery system. Please contact us to discuss your special application
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