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Custom CVD Furnace System
Custom CVD Furnace System

Custom CVD Furnace System

Model:KJ-T1200CVD

Description:

Part I: Standard Parts heating Tube Furnace Display LED Display(Computer Control) Max. Temperature 1200 Continuous Temp. Working ≤1100℃ Temperature Zone 150*200*150mm(3 Zones) independent temperature control

Detailed
Part I: Standard Parts heating
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Tube Furnace
Display LED Display(Computer Control)
Max. Temperature 1200
Continuous
Temp.
Working ≤1100℃
Temperature Zone 150*200*150mm(3 Zones)
independent temperature control
with
Heating Element Electric mo with wire
Thermocouple K type
Temperature
Accuracy
Control ±1℃
 
 
 
 
Tube Size
160x 1000mm (OD x minimum L)
150mm(ID±2mm) Thickness 5mm
Material:Quartz tube
 
quarz tube
Temperature Control PID  automatic  control  via  SCR power
control
Heating curves 30 steps programmable
 
Safety Element
Over-temperature Alarm Over-current protection Power off when door open
Thermocouple broken indication
 
 
 
 
 
Vacuum Flange
One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a
PSV.
 
 
Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high
pressure.
3 way Valve One for KF25 vacuum valve
Second for 1/8” valve
Third for 1/2” valve(to bubbler)
Power Supply 380V 50/60Hz 3 phases
Output Power Base on the final design
 
Part 2 Vacuum pump system
 
 
 
 
Vacuum Pump


VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valve
 
Vacuum rate: -0.1mpa(Relative
pressure)
 
Part 3 4 way Mass flow meters
 
 
 
 
 
 
 
 
 
 
 
4 Way Mass Flow Meters (Computer control)
Four precision mass flow meters :
MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. Ar
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually
MFC could be controlled on the computer.
l Mixing gas will be pre-heating at 100-200C before flow into the furnace tube.
l SS tube with sprial shape
l (For reference only)
 
cvd  
 
cvd tube furnace

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Contact Information
E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

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Zhengzhou/Kejia

YouTuBe

Zhengzhou/Kejia

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