Casing *Double layer steel casing with air cooling. * Furnace shell =60℃ Processing Tube *Material: Fused quartz tube (80 mm OD X 1000 mm L, and SS flanges) Heating Element Fe-Cr-Al Alloy doped by Mo Working Temperature *Max. Heating Temp.: 1200C *Continu
*Double layer steel casing with air cooling.
* Furnace shell <=60℃
|Processing Tube||*Material: Fused quartz tube (80 mm OD X 1000 mm L, and SS flanges)|
|Heating Element||Fe-Cr-Al Alloy doped by Mo|
*Max. Heating Temp.: 1200°C
*Continuous Working Temp.: 1100°C
|Heat-up Rate||Heat-up rate: 1 - 10°C/min|
|Heating Zone Length||
*Total heating zone: 440 mm
*Constant Temp. Zone: 150 mm (± 1°C)
*LCD Touch Screen
*Temperature accuracy: ± 1°C
*Thermocouple: K type built inside the furnace
One pair of stainless steel vacuum flange (gas and vacuum sides) with:
*one mechanical pressure gauge (compatible with MFC system)
*two needle valves (1/4'')
*one KF-25 connector, KF-25 vacuum block valve, KF-25 SS vacuum bellows, KF-25 quick clamp with rubber o-rings, adjustable flange support (left and right side - 2 pcs) for KF-25 flanges, etc. for the high vacuum station
|High Vacuum Station structure||
*Max. Loading: 100 Lbs on top
*High vacuum station control panel (for basically molecular pump speed and vacuum levels):
*Inside: Turbo Molecular vacuum pump station
# All connections and fitting and valves between turbo pump and backing pump-dry pump and quartz tube section according to the KF-25 connection norm
|Vacuum Level||6.7*10-3pa (under empty and room temp. condition)|
|Mass flow gas control structure||
#Controller-1: 1 - 100 sccm
#Controller-2: 1 - 200 sccm
#Controller-3: 1 - 500 sccm
*Working voltage: AC 220 V / 50 Hz
*7'' color touchscreen control,
*With mechanical pressure gauge, needle valve, gas pipeline, gas mixing tank, stop valves and fittings, etc. included
*Made of 316 stainless steel valve
|Total power consumption of the system||5 kW|
|Rated voltage of the whole system||AC 220 V, Single Phase, 50 Hz|
|Customized Vacuum Flange With Three Feedthoughs, Gas Valve and Mechanical Pressure Gauge||
Compatible for 80 mm quartz tube (above system), three thermocouple feedthoughs (K type TC) - which will be used only for center and the two ends of constant temperature zones inside the quartz tube (for temperature calibration between PID / TC and real constant zone temperatures). This unit will not be used during the normal processes.
*Made of 304 Stainless Steel with double high-temperature silicone O-ring.
*Three feedthrough, one valve and one mechanical gauge are installed on the flange.
*The feedthroughs are fit to 1/4" O.D steel pipes of thermocouples K-type with K-type cable plugs.
*1/4" tube fitting to make additional gas inlet or outlet is connected to valve.
*The assembly kit will seal 80 mm OD quartz tube.
|K type thermocouple||Temperature measured by 3 calibration thermocouple will be display on the LCD touch screen of Tube furnace directly.|