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Three temperature zone rotating CVD system
Three temperature zone rotating CVD system

Three temperature zone rotating CVD system

Model:KJ-T1200-FD

Description:

This three-temperature zone rotating cvd system has 3 heating zones to improve temperature uniformity, and is equipped with a 3-channel precision mixing system. The furnace body is open-type design, which is convenient for operation and rapid cooling of samples. ...

Detailed
Main uses:
    Mainly used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.

Product introduction:
    KJ-T1200-FD is a three-temperature zone rotating CVD system, with 3 heating zones to improve temperature uniformity, and is equipped with a 3-channel precision gas mixing system. The furnace body is open-type design, which is convenient for operation and rapid cooling of samples. 

Technical Parameters:

product name Three temperature zone rotating CVD system
spinning speed 0-15rpm/min adjustable
slope  One side tilt: 0-15 degrees adjustable
Vacuum Rotary vane pump and related connecting parts are optional, and the vacuum degree can be -0.1MPA
Precision mixing system Three-channel mass flow meter
A road: 0-500sccm
B road: 0-500sccm
C road: 0-500sccm
Maximum temperature 1100 °C
Operating temperature 1000℃ and below 
Length of heating zone 600mm
temperature control 30-segment PID automatic control, touch screen can store multiple processes, can realize data recording and copy
Heating rate 0~10 ℃/min adjustable
Furnace tube material stainless steel pipe
Furnace tube size Inner diameter: 200mm*length 1200mm
Highest power Subject to actual needs
More specifications can be customized according to requirements

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