Graphene Growth Furnace_Zhengzhou Kejia Furnace

Graphene Growth Furnace

Model：KJ-T1200-S60LC-H2

Description：

KJ-T1200-S60LC-H2 graphene preparation machine is composed of KJ-T1200 open slide rail tube furnace, vacuum system, mass flow meter gas circuit system, and plasma power supply system. It can be applied to graphene growth, etc.

Device Fundamentals:
Equipment basic structure
KJ-T1200-S60LC-H2 graphene preparation machine is composed of KJ-T1200 open slide rail tube furnace, vacuum system, mass flow meter gas circuit system, and plasma power supply system. It can be applied to graphene growth, etc.

Main functions and features:
1. PECVD has the advantages of low basic temperature, fast deposition rate, good film quality, less pinholes, and not easy to crack, etc.;
2. The vacuum system consists of a rotary vane vacuum pump and an imported digital vacuum gauge, and the maximum vacuum can reach 10Pa;
3. The digital mass flow control system is composed of multi-channel mass flow meters, flow display instruments, etc., to achieve precise measurement and control of gas flow; touch screen operation, simple and convenient operation.
4. KF quick flange sealing is adopted, which is convenient and quick to load and unload; the pipeline is connected with the world's ferrule, and there is no air leakage;

Main technical parameters of the equipment:

Product name	Graphene Growth Furnace (CE Certification)
Open type slide tube furnace section
Model	KJ-T1200-S60LC-H2
Furnace tube size	Φ60mmX1600mm
heating zone	300mm
working temperature	1100℃
Max.temperature	1200℃
Temperature control method	Type K thermocouple
The way to control	The temperature control system adopts touch screen operation, artificial intelligence adjustment technology, has PID adjustment, self-tuning functions and can compile 30 sections of heating and cooling programs;
Temperature control accuracy	±1℃
Temperature control protection	With over temperature protection function
Heating rate	0-20ºC/min ，Suggest10ºC/min
Heating element	Molybdenum resistance wire
Operating Voltage	AC 220V single phase 50HZ
heating power	3KW
Furnace material	Alumina polycrystalline fiber
sealing system	The furnace tube and the flange are extruded and sealed by a silicone O-ring, which is easy to remove, can be removed repeatedly, and has good air tightness.
Furnace structure	Slide rail structure, can achieve rapid cooling
Furnace tube	quartz tube
reference picture
vacuum system part
name	vacuum system
The main parameters	1.It is composed of rotary vane vacuum pump and imported digital vacuum gauge, and the vacuum degree can reach 10Pa 2.KF25 quick connection, stainless steel bellows, manual flapper valve is connected with flange, vacuum pump; 3.Imported digital vacuum display gauge, its measuring range is 5×10-5-1500mbar, the measurement accuracy can reach 0.1mbar, and coefficient conversion is not required to measure different gas types
Air system part
name	Four-way mass flow meter
The main parameters	Four-channel precision mass flowmeter: touch screen control, digital display. Flow range Flow range: 1.MFC 1-MFC4: 0-1000sccm adjustable 2. A mixing tank 3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases; 4. Air inlet and outlet: 4 in and 1 out Flow Control: Manual Rotary Adjustment Connection method: double card sleeve connection
Plasma Power Section
name	500W Plasma Power
Power range	0-500W(Continuously adjustable)
working frequency	13.56MHZ+0.005%
Operating mode	Continuous output
power stability	≤2W
Maximum reflected power	70W
Power protection settings	DC overcurrent protection, power amplifier overtemperature protection, reflected power protection
Supply voltage/frequency	single phase AC（187V-253V）50-60HZ
cooling method	air cooling
Total Weight	13.5KG
Random gift	1 quartz tube, crucible hook, furnace plug, sealing ring, water cooler, silicone tube, Allen key, instruction manual, warranty card, etc.
After-sales service	The whole machine is guaranteed for one year, and the whole machine is guaranteed for life (the heating elements, sealing rings and other random accessories are not included in the warranty scope)