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  • 1200 Single Zone CVD System


    Continuous Temp:

    Chamber/Tube size:


    Brief Introduction:  
        KJ-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. 
    Technical Parameter:
    Brand Kejia
    Model KJ-T1200
    Part I: Standard Parts
    Tube Furnace
    Display 7” LCD Touch Screen
    Max. Temp. 1200℃ for short time
    Woking Temp. ≤1100℃
    Heating Rate Suggestion: 0~10℃/min 
    Temperature Zone 440mm
    Heating Element Resistance wire with Mo
    Thermocouple K type
    Temperature Control Accuracy ±1℃
    Tube Size 100 x 1000mm (OD x minimum L)
    Material:  Quartz tube 
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange.
    One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. 
    Another end of the flange has a KF25 port with a barbed needle valve
    Power 220V, 50 Hz, single phase at max. 4KW
    Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.
    Vacuum inside the tube is around 10-1 Torr.
    (RM temp. And empty tube condition)
    Flow rate: 2L/S 
    The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories 
    Digital vacuum gauge is included
    Mass Flow Meters
    (Seven Star Brand)
    With LCD Touch Screen Controller
    (Desigen by Kejia with Kejia logo)
    One Float flowmeter + Five precision mass flow meters :
    MFC Accuracy is: ±1.5% F.S.
    MFC 1 for nitrogen : Gas flow range from 0~100 sccm
    MFC 2 for hydrogen : Gas flow range from 0~200 sccm
    MFC 3 for methan : Gas flow range from 0~300 sccm
    MFC 4 for argon: Gas flow range from 0~400 sccm
    MFC 5 for oxygen: Gas flow range from 0~500 sccm
    One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.

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