Features |
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Dual quartz tube: 130 mm Dia (5"). outside tube suspended by 101 mm Dia (4") tube inside. The metallic foil will be wrapped inside tube surface for CVD reaction
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Vacuum sealing flanges for the dual tube, which allow reactive gas to go through between two tubes ( 20mm space ) for reaction, and forced air can go through the central tube for fast cooling.
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Max. Working Temperature: 1200°C
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Valve and vacuum gauge is included
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Furnace structure |
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Three heating zones: (900mm, 36" in total)
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Zone 1: 300mm (11.8")
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Zone 2: 300mm (11.8")
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Zone 3: 300 mm (11.8")
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Max. 25" (625 mm) long with +/- 1°C accuracy if set three zones at the same temperature.
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Three precision temperature controllers with 30 segment programmable and +/- 1° C accuracy.
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Max. Working Temperature: 1200°C
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Continuous Working Temperature: 1100°C
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Heating Rate: <= 20°C /min
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Constant Temperature Zone: 25" (625 mm) length (Three zones are heating at equal temperature simultaneously)
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Power |
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AC 208-240V Single Phase, 50/60 Hz (40A breaker required).
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7 KW Max.
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Powder cord is included without a plug.
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CE certified
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Processing Tubes |
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Two High purity Fused Quartz Tubes included
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Outside tube: 130mm O.D. x 122 mm I.D. x 1480 mm
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Inside tube: 102mm O.D. x 94 mm I.D. x 1800 mm
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Vacuum sealed flanges |
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One pair of flange made of SS304, which seals tightly between tubes by two high-temperature O-rings (10-2 by the mechanical pump and 10-5 by the molecular pump ).
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The flange is built with water cooling jacket. When working temperature over 900°C, it is required to use cooling water. You may either use tap water or use our chilling water circulation at picture below
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One KF25 adapter is installed on the left flange to connect a vacuum pump.
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One stainless steel needle valve is installed on right flange (please choose connector at picture below before order)
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Optional. You may order a Compact Liquid Vaporization Systems for better CVD
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Optional |
Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u
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Furnace Dimension |
1030 x 430 x 580 mm ( not included flange and tube ) |
Net Weight |
about 90 kg |
Shipping package size after crating |
65"x45"x35" |
Warranty |
One year limited warranty for electrical parts. (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products page.) |