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Position:Home > Products > Tube Furnace > Single-Zone Tube Furnace > 250-1200℃ Tube Furnace >
1100℃ large-diameter tube furnace
1100℃ large-diameter tube furnace

1100℃ large-diameter tube furnace

Model:KJ-1100X-XX

Description:

KJ-1100X-XX-S is a single heating zone and adapts to various sizes of the quartz tube (6" or 8.5" outside diameter). The heating temperature is up to 1100°C.

Detailed
Specific Introduction:
    KJ-1100X-XX-S is a single heating zone and adapts to various sizes of the quartz tube (6" or 8.5" outside diameter). The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built-in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with the accuracy of +/-1°C and 30 programmable segments.

Parameters:  

Model GSL-1100X-6 (Specification 1)
GSL-1100X-8.5 (Specification 1)
GSL-1100X-11 (Specification 1)
GSL-1100X-6-S (Specification 2)
GSL-1100X-8.5-S (Specification 2)
GSL-1100X-11-S (Specification 2)
Product tips 1. Prompt for large volume equipment 2. Prompt for a variety of optional accessories 3. Prompt that the picture is not updated
High purity quartz tube size Specification 1: 152 OD x 143 ID x 1320mm L
Specification 2: 152 OD x 143 ID x 1020mm L
Specification 1: 216 OD x 206 ID x 1320mm L
Specification 2: 216 OD x 206 ID x 1020mm L
Specification 1: 279 OD x 269 ID x 1320mm L
Specification 2: 279 OD x 269 ID x 1020mm L
Quartz boat (optional) Compatible with up to 4" diameter substrates
Compatible with up to 6" diameter substrates
Compatible with up to 8" diameter substrate
Basic parameters Thermocouple: K-type thermocouple. Suggested heating rate: ≤10℃/min
Temperature: 1000℃ (1100℃<1h) Power supply: AC220, 50Hz max 8KW
Heating zone Specification 1: Heating zone length: 600mm
Specification 2: Heating zone length: 900mm
Furnace structure ·Double-layer shell structure with air cooling system
·The equipment is equipped with 2 alumina pipe plugs. When the equipment is used, the pipes must be plugged into both ends of the furnace tube (to ensure the tightness of the constant temperature zone and the sealing ring)
·High-purity alumina fiber as the furnace material (the surface is coated with high-temperature alumina coating, which can improve the heating efficiency and extend the life of the furnace)
·The furnace can be used as an annealing or diffusion furnace, and the maximum 8" wafer can be placed in the corresponding quartz boat
Heating element Doped with molybdenum, iron, chromium and aluminum (the surface is coated with zirconia coating, which can greatly extend the service life)
Sealing flange ·Using hinged flanges and O-rings and mechanical pumps can make the vacuum reach 10-2 Torr (reference value)
·A set of temperature test device (armored thermocouple, compensation wire and temperature meter) can be purchased to test the temperature inside the furnace tube
·Left water-cooled flange: vacuum pressure gauge, stainless steel needle valve and 1/4" pagoda mouth joint
·Right water-cooled flange: kf40 vacuum interface, convenient to connect to the bellows, pump and kf40 flapper valve applicable to kf40. (If your pump has a kf25 interface, you need a kf40-kf25 adapter)
Temperature Control System ·Contains a YD518P temperature controller
·PID automatic temperature control system
·Intelligent 30-segment programmable control
·Temperature control accuracy: ±1℃
·Default DB9 PC communication connection port
·Passed MET certification
·Computer temperature control software (for YD518P series controller) can be purchased to control the heating curve and export data
Temperature calibration (optional) ·Regularly calibrate the temperature of the tube furnace to maintain the accuracy and uniformity of the temperature. You can purchase a simple calibration kit from our company to assist you in this work. The complete calibration kit includes
·48"L (1/4"OD) K-type thermocouple calibration
·An Omega temperature calibrator
·Thermocouple Compensation Wire
·You can consider a molecular pump, the vacuum degree can reach 10-5 Torr
Dimensions Specification 1: 1320 L x 650W x 990 H mm plus flange length 1360mm
Specification 2: 1020 L x 650W x 990 H mm plus flange length 1060mm
Furnace size: Φ320X600
Net weight About 200 kg
Warranty One year warranty and lifetime technical support.
Special tips: 1. Consumable parts such as heating elements, quartz tubes, sample crucibles, etc. are not included.
2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.
Vacuum system ·Various vacuum systems are available
·A cold vacuum trap can be purchased to avoid pollution caused by the vacuum pump
Quality Certification All electrical components (>24V) have passed UL/MET/CSA/CE certification. If the customer pays the certification fee, the company guarantees that a single device has passed the German TUV certification or CAS certification.
Notes for use ·The air pressure in the furnace tube cannot be higher than 0.02MPa
·Due to the high internal pressure of the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when the gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure lower than 0.02MPa. It is recommended to purchase a pressure reducing valve from our company. The company's pressure reducing valve has a range of 0.01MPa-0.1MPa, which will be more accurate and safe when used
·When the temperature of the furnace body is higher than 1000℃, the furnace tube must not be in a vacuum state, and the air pressure in the furnace tube must be equal to the atmospheric pressure
·The gas flow into the furnace tube must be less than 200SCCM to avoid the impact of the cold atmosphere on the heated quartz tube
·Long-term use temperature of quartz tube <1100℃
·For the sample heating experiment, it is not recommended to close the exhaust valve and intake valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you should always pay attention to the indication of the pressure gauge. If the indication of the air pressure is greater than 0.02MPa, you must open the vent valve immediately to prevent accidents (such as furnace tube rupture, flange flying, etc.)
Application tips ·How to put pipe plug and vacuum flange on Kejia tube furnace
·In order to obtain the accurate temperature in the tube furnace, the temperature needs to be calibrated before use, please click here to learn how to use
large-diameter tube furnace
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