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1200℃ Compact Magnet Driven Sliding Tube Furnace for DVD & RTP
1200℃ Compact Magnet Driven Sliding Tube Furnace for DVD & RTP

1200℃ Compact Magnet Driven Sliding Tube Furnace for DVD & RTP

Model:KJ-1200X-S-DVD

Description:

KJ-1200X-S-DVD is a compact magnet driven sliding 2" tube furnace with a max. the working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmospheres for 2D material growth.

Detailed
Specific Introduction:
    KJ-1200X-S-DVD is a compact magnet driven sliding 2" tube furnace with a max. the working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD)  or rapid thermal processing (RTP) under various atmospheres for 2D material growth. 
Parameters:
Furnace Feature

 
  • One high thermal conductivity Alumina flat sample holder (2" Lx1"W)  is fixed on K type sample, and the thermal couple with the sample holder can be moved inside quartz tube driven by a magnet manually to find desirable temperature position inside the tube for evaporation or deposition. 
  • One NIST certified precision temperature monitor is connected to thermal couple and sample holder via feedthrough on the vacuum flange.
  • One magnet is embedded inside the thermal block, and another magnet is placed outside the tube.  move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
  • 30 segment programmable temperature controller is installed in furnace to set up Max. working temperature up to 1200oC at the center of the furnace
  • One small quartz crucible is included, which can be used to contain evaporation material, or please wafer on top for deposition based on your application.   
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz   (Please confirm voltage when place order )
  • 1.5 KW
Max. Temperature 1200°C (<1 hour)
Continuous Temperature 1100°C ( continuous)
Max. Heating Rate <= 20 °C/min
Heating Zone
  • Heating Zone Length:  8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone:    2.3" (60mm)  (+/-1°C) @ 1000 °C 
  • You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional:  The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost.             
Temperature Accuracy +/- 1°C
Heating Elements Fe-Cr-Al Alloy doped by Mo


Tube Size
2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
One small quartz boats is included for placing samples or evaporation materials.
 Vacuum Flanges 2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port
Vacuum Level 10-2torr (by mechanical pump)
Fitting Ports
      &
Optional Parts
  • You may need a vacuum valve at the end of vacuum port ( click picture left to order )
  • You may consider ordering quick connecting flange at extra cost.
  • You may order a multi-channel gas delivery system for DVD or CVD operation.
Dimensions
 
With lid close: 1055mm (L) × 300mm(W) × 400mm(H) 
With lid open: 1055mm (L) × 300mm(W) × 560mm(H)
Net Weight 22 Kg
Shipping Package Size 48''(L) x 24''(W) x 28''(H)
Shipping Weight 120 lbs
Warranty  One year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty.

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