Position:Home > Products > CVD/PECVD System > CVD Furnace System
[!--oldtitle--]

KJ-T1600 Touch Screen CVD Furnace

Model:KJ-T1600 CVD

Description:

KJ-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 

Detailed
Brief Introduction:  
KJ-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
 
Technical Parameter:
Model KJ-T1600 CVD with 3 MFC Gas channels
Tube Furnace Display LCD Touch Screen
Max. Temperature 1600℃ for short time
Continuous Working Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 300mm
Heating Element MoSi2 Heaters
Thermocouple B Type
Temperature Control Accuracy ±1℃
Tube Size 80x1000mm (OD x L)
Material:  Alumina Tube
Tube Block Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Temperature Control PID automatic control via SCR power control
Program and Ramps 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valves
 
Power 220V, 50 Hz, single phase at max.6KW
Mass Flow Meters
(LCD Touch Screen)
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
 
 
 

 
Products
MESSAGE
tel Email FaceBook YouTuBe

Tel Number

181-3719-5600

Email

web@kejiafurnace.com

FaceBook

Zhengzhou/Kejia

YouTuBe

Zhengzhou/Kejia

kejialiuyan