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Single-zone Tube Furnace with High Vacuum & 3 Channel Precision Gas Flow Station for CVD
Single-zone Tube Furnace with High Vacuum & 3 Channel Precision Gas Flow Station for CVD

Single-zone Tube Furnace with High Vacuum & 3 Channel Precision Gas Flow Station for CVD

Model:KJ-1200X-HVC

Description:

The KJ-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided).

Detailed
Specific Introduction:
    The KJ-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.
Parameters:







OTF-1200X series tube furnace
 
Casing
  • Double-layer steel casing with air cooling.
  • Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube Material: Fused quartz tube
One processing tube is included with the furnace.
Please contact us to specify the tube diameter. 
Power 2.5KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp. Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 440mm
Constant Temp. Zone: 150mm (±1°C)

Temp. Control
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace

Vacuum Seal
  • One pair of stainless steel vacuum flange with:
    •  one mechanical pressure gauge
    •  two needle valves 
    • one KF-25 connector for the high vacuum station.
Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz

High Vacuum Station

Structure
Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump 
Vacuum sensor is included

Volume Flow Rate
Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )

Mass Flow Gas Control
 
Structure Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm  
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
Power 23W per channel
Rated Voltage AC 220V/50Hz Single phase
Temperature Controller
  • Temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • Default DB9 PC communication port
Temperature controller (optional)
 
  • Temperature control software kit + 15" laptop package is available at the options bar.
  • You may upgrade the temperature controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD.
Optional 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software is available upon request at extra cost
Warning
 
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
  • The flow rate for gases should be limited to < 200 ml/min for reducing thermal shocks to the tube
  • Vacuum pressures may only be safely used up to 1000°C 
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products page.)
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Contact Information
E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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