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Position:Home > Products > CVD/PECVD System > PECVD Furnace System >
1500℃ Max.Three Zone PECVD System w/ 80 mm Processing Tube
1500℃ Max.Three Zone PECVD System w/ 80 mm Processing Tube

1500℃ Max.Three Zone PECVD System w/ 80 mm Processing Tube

Model:KJ-1500X-III-PE

Description:

KJ-1500X-III-PE is three zones 1500ºC PE-CVD tube furnace system consists of 300W RF plasma source, 81Dx 2133mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high-quality oilless vacuum pump.

Detailed
Specific Introduction:
    KJ-1500X-III-PE is three zones 1500ºC PE-CVD tube furnace system consists of 300W RF plasma source, 81Dx 2133mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high-quality oilless vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene or SiC coating.
Parameters:


Three Zone 1500°C Split Tube furnace
 
  • Max 1500ºC, and for 1400ºC continuous heating
  • Three programmable precision digital temperature controllers with 30 segments.
  • Three separately controlled Heating Zones:
    • 200 mm / each  ( included 20 mm spacing )
    • Total zone length:  600 mm  
  • Mullite ceramic tube , Size: 81 O.D x 73 I.D x 2133 L mm
  • Input power: 208 – 240V AC input, a single phase at max. 6.6KW.
  • Click the Picture below left to see detailed specs.
  • Vacuum sealing flanges are included for immediate use.  One end flange has a quartz window so that plasma glowing can be seen through the window


Plasma RF Power Supply

 
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      200W max.
  • Matching:                   Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                        <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Anti-corrosive Pressure Gauge
 
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
Oil-less Vacuum Pump Station and Valves
 
 
Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart
KF25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve for customer's plug and play
10E-2 Torr vacuum can be achieved inside processing tube    

Mass Flowmeters & Gas Mixing Station
 
  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. One gas mixing tank is installed on the bottom case with liquid release valve.
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM  
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet fitting: four 1/4NPS.
  • Gas outlet fitting: four 1/4NPS.
  • Power: 185-220VAC 50/60Hz
  • 4 stainless steel needle valves are installed on the left side of the bottom case to manually control the mixing of 4 gas types.
  • Four-channel gas flows are integrated into one PLC with touch screen panel to control
  • ( optional: constant pressure control module )



Temperature Control
 
  • Three precision digital temperature controllers to control three heating zone independently
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing a control module.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. 
 

Overall Dimensions
 
Furnace: 865 L x 654 W x 707 H mm 
Sliding Rail: dual rail with 1750 mm length

  • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  • Net weight: 220 Lbs.
  • Shipping Weight: 1200lbs.
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
Compliance
   
  • CE Certified
NRTL or CSA certification is available upon request at extra cost.
Application Notes
 
  • The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°

Shipping Weight & Dimensions
  • Total 4 Pallets
  • #1: 1200 lbs, 93"x40"x59"
  • #2: 220 lbs, 48"x40"x45"
  • #3: 285 lbs, 48"x40"x45"
  • #4: 200  lbs, 48"x40"x45"
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E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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