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Position:
E-mail:
Tell:
Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
181-3719-5600
Product description:
Touch screen RTP rapid annealing furnace is a compact rapid heat treatment tubular furnace, equipped with a quartz cavity and vacuum flange, heated by infrared lamps, the heating rate can reach 50°C/s, 30-segment programmable, PID automatic control, it is specially designed for the annealing of semiconductor or solar cell substrates.
Application fields:
It can perform rapid heat treatment on samples in a vacuum and atmosphere environment. It is mainly used in college laboratories and industrial and mining enterprise laboratories, such as: thin film deposition, rapid annealing of different materials, silicide, diffusion, crystallization and densification, etc.
Technical Parameters:
Touch screen RTP rapid annealing furnace is a compact rapid heat treatment tubular furnace, equipped with a quartz cavity and vacuum flange, heated by infrared lamps, the heating rate can reach 50°C/s, 30-segment programmable, PID automatic control, it is specially designed for the annealing of semiconductor or solar cell substrates.
Application fields:
It can perform rapid heat treatment on samples in a vacuum and atmosphere environment. It is mainly used in college laboratories and industrial and mining enterprise laboratories, such as: thin film deposition, rapid annealing of different materials, silicide, diffusion, crystallization and densification, etc.
Technical Parameters:
| Touch screen RTP rapid annealing furnace | |
| Model | KJ-T1200RTP-C |
| Max.temperature | 1000℃ |
| Working temperature | 900℃ |
| Furnace tube material | Quartz tube single head |
| Quartz tube | Φ50/Φ60/Φ80/Φ100/Φ120/Φ150mm optional |
| Temperature zone length | 200/30/400mm optional |
| Furnace chamber size | Alumina polycrystalline fiber |
| Heating element | Infrared lamp |
| Power supply | 220V/380V 50/60HZ |
| Heating rate | 0-50℃/S |
| Thermocouple | K stype |
| Sealing method | Stainless steel sealing flange |
| Furnace structure | open |
| Sliding method | Left and right sliding / no sliding optional |
| More specifications can be customized according to demand | |
