Position:Home > Products > Tube Furnace > RTP fast Annealing Furnace
[!--oldtitle--]
  • 1200℃ Crucible Movable Tube Furnace

    Model:KJ-1200X-S-HPCVD

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Specific Introduction:
        KJ-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller.  It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research.
    Parameters:
    Split Tube Furnace
    • 208 - 240 VAC, 50/60Hz,  1.2 KW max. power consumption
    • Working temperature:  1100°C continuous and 1200°C Max.
    • 2" quartz tube (50mm O.D x 44mm I.D x 450mm L)  with vacuum sealed flanges.       
    Temperature Control
     
    PID automatic control via solid state relay with 30 steps programmable
    • Built in Over Temperature and Thermocouple Failure Protection
    • +/-1°C accuracy
    • K-type thermal couple
    • Heating zone  length:  200mm  ( 8")
    • Constant temperature zone: 60 mm   (+/-1°C @ 1000 °C )
    Vacuum Sealing
      
     
    • 2" quick clamp flange with 1/4''  fittings, vacuum gauge as well as needle valve on the right side
    • The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
    • Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve 
    • Max. Vacuum level:  10E-2 torr by mechanical pump and 10-E5 by turbopump 
    Internal Traveling Mechanism                     &
    PLC Control Pannel
    • One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a  mini-crucible boat in the chamber. 
    • A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max.
    • Touch screen control panel allows travel distance setting and temperature display of crucible position
    • Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
    • A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple
    • AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply 
    Max. Heating & Cooling Rate The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone.  The typical ramp/cool rate is listed in below
     
     
    Optional Parts
    • You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
    • Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
    • You may order multi-channel gas delivery system for DVD or CVD operation
    Warranty  One year limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty) 
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan