Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>
KJ-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for
KJ-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research. Parameters:
Split Tube Furnace
208 - 240 VAC, 50/60Hz, 1.2 KW max. power consumption
Working temperature: 1100°C continuous and 1200°C Max.
2" quartz tube (50mm O.D x 44mm I.D x 450mm L) with vacuum sealed flanges.
PID automatic control via solid state relay with 30 steps programmable
Built in Over Temperature and Thermocouple Failure Protection
K-type thermal couple
Heating zone length: 200mm ( 8")
Constant temperature zone: 60 mm (+/-1°C @ 1000 °C )
2" quick clamp flange with 1/4'' fittings, vacuum gauge as well as needle valve on the right side
The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve
Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by turbopump
Internal Traveling Mechanism &
PLC Control Pannel
One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber.
A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max.
Touch screen control panel allows travel distance setting and temperature display of crucible position
Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple
AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply
Max. Heating & Cooling Rate
The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone. The typical ramp/cool rate is listed in below
You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
You may order multi-channel gas delivery system for DVD or CVD operation
One year limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty)