Furnace Structure |
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Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
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High purity fibrous alumina insulation for maximum energy saving.
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Split cover with Interlock protection, cut the power if lid open during furnace heating process.
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Power Input |
208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required) |
Heating Elements |
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8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm)
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Standard working life: 2000 hrs. ( depends on heating rate )
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The Halogen light tube is consumable. Please click picture left to order a spare one
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Heating Zone |
12" length with 4" constant temperature zone within +/-5ºC uniformity |
Working Temperature |
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1100ºC Max. for < 10 minutes
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1000ºC Max. for < 20 minutes (Note: if running longer time, furnace case will > 100oC, must use fan cooling case from outside )
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800ºC Max. for < 120 minutes
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600ºC Max. for Continuous
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Max. Heating Rate |
50ºC/sec |
Cooling Rate |
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Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure)
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Lowest Cooling: 10 ºC / minute
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Thermocouple |
K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath |
Temperature Controller |
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FA-YD808P-AG temperature controller is included.
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Proportional–integral–derivative control (PID control) and auto-tune function
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30 segments programmed with ramping, cooling and dwelling steps
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Built-in over-temperature alarm and thermocouple failure alarm
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+/- 1 ºC temperature control accuracy
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Default DB9 PC communication port
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Temperature controller (optional) |
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MTS02-Y Temperature control software kit + 15" laptop package is available at the options bar.
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You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controller which includes a communication cable (RS485 - USB) and a software CD.
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Quartz Tube & Sample Holder |
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Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length.
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One 3" Diameter AlN sample holder for annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area. The sample holder is removable from the flange for using the RTP furnace for other purposes
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Optional: 3'' O.D Thick Graphite Substrate can be used as an alternative to the AIN plate.
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Optional: Graphite Crucible:87 mm OD x 71 mm ID x 12 mm Height with lid is designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD furnace with a graphite crucible coated with SiC.
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Optional: 4" dia. sample order is available upon request at extra cost.
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Vacuum Flange |
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KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket.
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It only requires water cooling in long-running times at temperatures > 600oC.
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Circulating water rate: 0.5 m3 /hr.
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The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed.
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Insert-able thermal-couple for accurate measurement.
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Vacuum Pump (optional)
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EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package.
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Water Cooling (optional) |
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Cooling water is required.
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Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
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We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.
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Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt.
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Flow-meter |
One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min |
Vacuum Gauge |
A digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace. |
Vacuum Pressure & Gas Fitting |
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Pressure can reach 50 more by using a mechanical vacuum pump with KF25 adapter
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Pressure can reach 10-4 torr by the molecular pump with KF25 adapter
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Dimensions |
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Flange closed: 1350mm(L) x 330mm(W) x 590mm(H)
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Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)
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Net Weight |
70 kg (150 lbs) |
Warranty |
One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products page). |