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Position:
E-mail:
Tell:
Whatapp:
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Specific Introduction:
KJ-1200X-RTP-4 is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". KJ-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD furnace
Parameters:
KJ-1200X-RTP-4 is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". KJ-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD furnace
Parameters:
| Furnace Structure |
|
| Power Input | 208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required) |
|
Heating Elements |
|
| Heating Zone | 12" length with 4" constant temperature zone within +/-5ºC uniformity |
| Working Temperature |
|
| Max. Heating Rate | 50ºC/sec |
| Cooling Rate |
|
| Thermocouple | K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath |
| Temperature Controller |
|
| Temperature controller (optional) |
|
| Quartz Tube & Sample Holder |
|
| Vacuum Flange |
|
|
Vacuum Pump (optional) |
|
| Water Cooling (optional) |
|
| Flow-meter | One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min |
| Vacuum Gauge | A digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace. |
| Vacuum Pressure & Gas Fitting |
|
| Dimensions |
|
| Net Weight | 70 kg (150 lbs) |
| Warranty | One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products page). |
