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  • Compact Atmosphere Controlled RTP Furnace with 4" ID Quartz Tube up to 1100ºC


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-RTP-4 is a  compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". KJ-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD  furnace 
    Furnace Structure
    • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
    • High purity fibrous alumina insulation for maximum energy saving.
    • Split cover with Interlock protection, cut the power if lid open during furnace heating process.
    Power Input 208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)

    Heating Elements
    • 8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)
    • Standard working life: 2000 hrs.  ( depends on heating rate )
    • The Halogen light tube is consumable.  Please click picture left to order a spare one
    Heating Zone 12" length with 4" constant temperature zone within +/-5ºC uniformity
    Working Temperature
    • 1100ºC Max. for < 10 minutes
    • 1000ºC Max. for < 20 minutes   (Note: if running longer time, furnace case will > 100oC, must use fan cooling case from outside )
    • 800ºC Max.   for < 120 minutes
    • 600ºC Max.   for Continuous 
    Max. Heating Rate 50ºC/sec
    Cooling Rate
    • Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure) 
    • Lowest Cooling:   10 ºC / minute
    Thermocouple K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
    Temperature Controller
    • FA-YD808P-AG temperature controller is included.
    • Proportional–integral–derivative control (PID control) and auto-tune function
    • 30 segments programmed with ramping, cooling and dwelling steps
    • Built-in over-temperature alarm and thermocouple failure alarm
    • +/- 1 ºC temperature control accuracy
    • Default DB9 PC communication port
    Temperature controller (optional)
    • MTS02-Y Temperature control software kit + 15" laptop package is available at the options bar. 
    • You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controller which includes a communication cable (RS485 - USB) and a software CD.
    Quartz Tube & Sample Holder
    • Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length.
    • One 3" Diameter AlN sample holder for annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area. The sample holder is removable from the flange for using the RTP furnace for other purposes
    • Optional:  3'' O.D Thick Graphite Substrate can be used as an alternative to the AIN plate.
    • Optional: Graphite Crucible:87 mm OD x 71 mm ID x 12 mm Height with lid is designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC.
    • Optional: 4" dia. sample order is available upon request at extra cost.
    Vacuum Flange
    • KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket.
    • It only requires water cooling in long-running times at temperatures > 600oC.
    • Circulating water rate: 0.5 m3 /hr.
    • The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed.
    • Insert-able thermal-couple for accurate measurement. 
    Vacuum Pump  (optional)
    • EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package.
    Water Cooling  (optional)
    • Cooling water is required.
    • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
    • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   
    • Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt. 
    Flow-meter One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
    Vacuum Gauge A digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.
    Vacuum Pressure & Gas Fitting
    • Pressure can reach 50 more by using a mechanical vacuum pump with KF25 adapter
    • Pressure can reach 10-4 torr by the molecular pump with KF25 adapter
    •  Flange closed: 1350mm(L) x 330mm(W) x 590mm(H)
    •  Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)
    Net Weight 70 kg (150 lbs)
    Warranty One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products page).

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