Furnace Features
(optional)
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Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
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Heated by shortwave IR tube lamps for fast heating
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Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD
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Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions.
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A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional).
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Vacuum flanges and the digital vacuum gauge are installed for immediate use.
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Power |
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AC 208-240V, single-phase, 50/60 Hz
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MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).
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Heating Element
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16 pcs 1.5 kW halogen heating tubes, ( OD = 13.3 mm, L= 390 mm )
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Standard working life: 2000 hrs. ( depends on the heating rate )
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The halogen light tube is consumable.
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Max. Temperature |
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900°C max (< 10 minutes )
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800°C (< 30 minutes )
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600°C (continuous operation)
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Temperature Accuracy |
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Max. Heating Rate |
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RT ~ 800ºC: 50 ºC/s
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800 ºC ~ 900 ºC: 10 ºC/s
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Max. Cooling Rate |
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60 ºC/min under 200 mTorr environment
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117 ºC/min under atmospheric pressure
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10 °C/min slowest
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Process Tube Size |
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High purity fused quartz tube
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Φ110 (OD) × Φ106 (ID)× 740 (L) mm
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Sliding Rails |
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Dual sliding rails made of Cr plated steel
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Sliding rail length: 400 mm
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Thermocouple |
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Two K type, 1/4" Dia x 24" length
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Temperature Controller
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Two temperature controllers for controlling two zones independently via SCR
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PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
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Built-in thermocouple broken protection.
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Over-temperature protection and alarm allow for operation without attendant(s).
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± 1 ºC temperature accuracy for dwelling.
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RS485 Communications Port.
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PC Control:
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An MTS-02 control module is included for PC control on this furnace.
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The new version of PC module is now compatible with Lab View 05/08/2014
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A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
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Vacuum Flanges
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SS water-cooled flanges on both sides.
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Left flange:
1/4" thermocouple feedthrough
1/4'' tube fitting
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Right flange:
KF 25 port with a right angle gate valve for vacuum pump
Needle valve with barb fitting as a venting port
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A digital vacuum gauge is included
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Retractable bellow design is optional on the left flange, which allows sample flash heating or retrieving for fast cooling under inert gas.
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Vacuum Level |
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Limited by the vacuum pump
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10^-2 torr can be achieved by the mechanical pump
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10^-4 torr can be reached by molecular pump
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The pump is not included.
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Water Chiller (optional) |
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Cooling water is required for the flange set.
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Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
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We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system
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Dimensions |
1300mm×600mm×810mm |
Net Weight |
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Shipping Weight |
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Warranty |
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One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
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