Furnace structure |
- Double-layer steel case with two cooling fans, which ensure low surface temperature
- Energy-saving high purity fibrous alumina liner and insulation
- High purity Al2O3 coating which provides a longer service life
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Power |
3 KW (20A Breaker) |
Voltage |
AC 208-240V Single Phase, 50/60 Hz, a power cord is included without the plug. |
Temperature range |
100~1100° C (Continuous); 1200° C (<1 hour) |
Max. Heating Rate |
≤ 20° C /min |
Tube Accessories (When the tube size is selected, compatible accessories will match it automatically, please refer to standard package for details) |
- One fused quartz tube with 1000mm L is included
- Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
- Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum, available at extra cost
- You may order flange support to avoid tube rotating
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Heating Zone Length |
- Two zones: each zone length 8" (200 mm)
- Total 16" (400 mm) heating zone
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Constant Temp. Zone |
- 150mm (+/-1°C) for each heating zone
- A longer constant temperature zone ( about 250mm ) can be created by setting both zones at the same temperature
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Temperature Controllers |
- 2 MET certified digital controllers with 30 programmable segments for precise control of heating rate, cooling rate and dwell time
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection
- Over-temperature protection and alarm allows for operation without attendant(s)
- +/- 1 ºC temperature accuracy
- Two K-type thermocouples (one for each zone)
- RS485 Communications Port
- Optional:
- The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at an extra cost
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us
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Thermal Couples |
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Temperature Accuracy |
+/- 1° C |
Heating Element |
Fe-Cr-Al Alloy doped by Mo |
Vacuum Flange & Fitting Ports (Certain flange size will be matched as the tube size is selected in options bar) |
- One pair of SS 304 vacuum flange with double high-temperature silicone O-rings are Included
- One Vacuum pressure gauge is installed, one digital vacuum gauge is available upon request at an extra cost
- The flange set has two 1/4'' Bard fittings, two-needle valve, one set of KF25 quick clamp, one blank flange fitting, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port
- The vacuum level can reach 10^-2 torr by a quality mechanical vacuum pump and 10^-5 torr by a molecular pump
- Optional: Please choose quality mechanical pump or molecular pump
- Optional (only for 80mm O.D and 100mm O.D tube size): Hinged type flanges with support frame for easy sample loading/unloading is available at an extra cost.
- Hinged Vacuum Sealing Assembly with Flange Support for 80 mm Dia Tube Furnace - EQ-FL-80KF25-HG
- Hinged Vacuum Sealing Assembly with Flange Support for 100 mm Dia Tube Furnace - EQ-FL-101KF25-HG
- You may order a pressure control module to keep the chamber at a constant pressure
- You may order gas flow control system to keep constant mixing gas flow
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Net Weight |
~40 kg |
Dimensions |
590mm(L) x 380mm(W) x 520mm(H) |
Crating Dimensions |
45"(L) x 45"(W) x 35"(H) |
Shipping weight |
200 lbs |
Warranty |
One-year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty.) |
Compliance |
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Application Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.Vacuum pressure may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation.
- You can set up the different temperature with each zone to create a thermal gradient for CVD deposition
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