Furnace structure |
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Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
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Refractory fibrous alumina insulation liner for maximum energy saving.
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Heating element: NiCrAl Resistance Wire
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Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.
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Hinged type flange with water cold for sample loading at easy
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This furnace can be used as annealing or diffusion furnace for 12" wafer uses a quartz boat
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Electrical lid actuator provides easy & hassle-free lid opening
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Heating zone |
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Total heating zone length 100mm (40")
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Three zones: 300 mm + 300 mm + 300mm (12" per zone)
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Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C)
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Cross section Temperature tolerance: +/- 3°C
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Working temperature |
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Max heating temperature: 1100°C
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Max heating & cooling rate: 10°C/min
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SiC heating elements, a total of 36 pcs
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Temperature control
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Three digital controllers with PID/self-tuning functions and 30 segments programmable.
Thermocouple: three K type thermocouples (one for each zone)
Control accuracy: +/- 1°C
Software for PC control is available as optional ( click picture on the left to order )
The Eurotherm temperature controller is available within +/- 0.1ºC at the extra cost |
European Temperature Controllers (optional upgrade) |
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1 heating channel
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1 program of 8 or 24 segment
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Alarm Relay: Form 'A' and Form ‘C’ built-in
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Digital Communications: RS485
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Temperature Accuracy: ± 0.1ºC
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Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Fused quartz tube
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Can accommodate 8.5" or 11" or 15" O.D quartz tube with 71" Length, please select tube size in the option bar
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High purity quartz tube, please click the bottom left picture to view.
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Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
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Vacuum sealing & Flange |
A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps.
One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration. |
Options |
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The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes
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One 48"L ( 1/4"OD) K type calibration thermocouple
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One Omega temperature calibrator
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5 feet long thermocouple power extension wire
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You may consider ordering turbopump for hi-vacuum up to 10-5 torr
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4'' ~ 8'' large size quartz boats
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We can make the furnace into a verticle upon request.
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Rated Voltage |
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Three Phase, 208V AC, 50/60 Hz ( 3 phase 380V is optional)
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AWG 8# Power cord is included (without plug)
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Power consumption |
Max. 20KW (100A breaker required) |
Product Dimension |
2000 L x 765W x 1130 H mm |
Net weight |
300kg |
Shipping dimension |
85" x 40" x 70" |
Shipping weight |
1200 lbs |
Warranty |
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One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
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You may contact us to order replacement quartz tube
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Compliance |
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CE Certified
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NRTL or NRTLCSA Certification is available upon request at the extra cost
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Warning |
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Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar
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Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation.
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Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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