1100℃ Three-Zone Open type Tube Furnace

Specific Introduction:
KJ-1100X-III furnace is a three-zone tube furnace with optional 8.5" or 11" or 15"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30 segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing, and sintering processes.
Parameters:

Furnace structure	Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C. Refractory fibrous alumina insulation liner for maximum energy saving. Heating element: NiCrAl Resistance Wire Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. Hinged type flange with water cold for sample loading at easy This furnace can be used as annealing or diffusion furnace for 12" wafer uses a quartz boat Electrical lid actuator provides easy & hassle-free lid opening
Heating zone	Total heating zone length 100mm (40") Three zones: 300 mm + 300 mm + 300mm (12" per zone) Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C) Cross section Temperature tolerance： +/- 3°C
Working temperature	Max heating temperature: 1100°C Max heating & cooling rate: 10°C/min SiC heating elements, a total of 36 pcs
Temperature control	Three digital controllers with PID/self-tuning functions and 30 segments programmable. Thermocouple: three K type thermocouples (one for each zone) Control accuracy: +/- 1°C Software for PC control is available as optional ( click picture on the left to order ) The Eurotherm temperature controller is available within +/- 0.1ºC at the extra cost
European Temperature Controllers (optional upgrade)	1 heating channel 1 program of 8 or 24 segment Alarm Relay: Form 'A' and Form ‘C’ built-in Digital Communications: RS485 Temperature Accuracy: ± 0.1ºC Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Fused quartz tube	Can accommodate 8.5" or 11" or 15" O.D quartz tube with 71" Length, please select tube size in the option bar High purity quartz tube, please click the bottom left picture to view. Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
Vacuum sealing & Flange	A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump. Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting. Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps. One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Options	The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes One 48"L ( 1/4"OD) K type calibration thermocouple One Omega temperature calibrator 5 feet long thermocouple power extension wire You may consider ordering turbopump for hi-vacuum up to 10-5 torr 4'' ~ 8'' large size quartz boats We can make the furnace into a verticle upon request.
Rated Voltage	Three Phase, 208V AC, 50/60 Hz （ 3 phase 380V is optional） AWG 8# Power cord is included (without plug)
Power consumption	Max. 20KW (100A breaker required)
Product Dimension	2000 L x 765W x 1130 H mm
Net weight	300kg
Shipping dimension	85" x 40" x 70"
Shipping weight	1200 lbs
Warranty	One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty) You may contact us to order replacement quartz tube
Compliance	CE Certified NRTL or NRTLCSA Certification is available upon request at the extra cost
Warning	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

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