Position:Home > Products > CVD/PECVD System > CVD Furnace System
[!--oldtitle--]
  • Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge

    Model:KJ-1200X-S50

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Specific Introduction:
        KJ-1200X-S50 Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments of heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.
    Parameters:
    Furnace Structure Heavy-duty steel casing
    Energy-efficient Al2O3 fibrous thermal insulation
      Power Consumption 1.75KW
    Input Voltage AC110V (For using under AC 220V, please contact our tech. support team)
    Temperature 1200 Max. for < 1hr
    1100 for continuously heating
    Heating rate <= 10C/min
    Processing Tube Quartz tube  50 x 43 x 600mm (O.D x I.D x Length)
    Heating Zone Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
    The following picture left shows the temp. distribution across the heating zone.
    Two thermal blocks are included and must be placed inside the tube
     
    Temperature Controller
    • PID automatic control and auto-tune function.
    • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    • Overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.        
    Heating Elements Fe-Cr-Al Alloy doped by Mo
    Digital Vacuum Gauge
     
    • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
    • Gauge is installed on the vacuum flange (left side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
    • Accurate pressure reading with any mixed gases
    Two Channel Gas Mixing Station
    • Two floating flow meters 16 to 100 mL/min flow rate range
    • Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
    Vacuum needle valves are made of SS304
    Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
    Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")
    Vacuum Flanges and Fittings
    • Vacuum fittings in standard package:
      • one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range
      • one 1/4" Swagelok tube connector
      • two KF-25 quick clamps
      • one 600mm length SS vacuum bellows
      • Structure  
    Vacuum
    • Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter, Bellow& KF-D25 Inlet, and KF25 Clamp are included.
    • Vacuum Pressure can reach 1E-2 Torr ( 50 m-Torr) 
    Net Weight 100 lbs
    Product Dimensions
    • Furnace: 340 x 300 x 400 mm
    • Vacuum Pump: 440 x 160 x 300 mm
    • Gas Station: 340 x 300 x 180 mm
    Shipping Weight 200lbs
    Shipping Dimensions 45x45x35"
    Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page). 
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan