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Position:
E-mail:
Tell:
Whatapp:
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Specific Introduction:
KJ-1200X-80-II is a CE-certified dual-temperature zone tube furnace CVD system with a tube diameter of 80mm. It uses a dual-rotary vane mechanical pump. The gas supply system is a three-way float gas supply system. Mix 1-3 kinds of gases, the vacuum degree can reach 10-2 torr.
Parameters:
KJ-1200X-80-II is a CE-certified dual-temperature zone tube furnace CVD system with a tube diameter of 80mm. It uses a dual-rotary vane mechanical pump. The gas supply system is a three-way float gas supply system. Mix 1-3 kinds of gases, the vacuum degree can reach 10-2 torr.
Parameters:
| Furnace structure |
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| Power |
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| Voltage |
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| Heating element |
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| Working temperature |
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| Continuous working temperature |
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| Maximum heating rate |
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| Furnace tube size and material |
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| Length of heating zone |
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Temperature Controller |
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| Temperature control accuracy |
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| Vacuum sealing system |
· Two stainless steel sealing flanges, with KF-25 interface on the flange and a mechanical pressure gauge installed on the flange (the blue meter in the picture is optional) · Vacuum degree: The vacuum degree can reach 5.5 m-torr. (5.5x10-3 torr) through the mechanical pump. If you want to obtain a higher vacuum degree, you can use a molecular pump, and the vacuum degree can reach 10-5 torr. ·Leakage rate <5 m-torr/min |
| Vacuum pump | The double-rotation mechanical pump is used, and the oil filter is installed on the mechanical pump, which can filter the oil fume generated when the vacuum pump is working, reduce the loss of pump oil, and protect the environment and human health. The minimum particle diameter of the filter is 0.3 microns. |
| Anticorrosive vacuum gauge | Optional: The anti-corrosion digital vacuum indicator imported by our company has a measurement range of 3.8x10-5 to 1125 Torr. There is no need for coefficient conversion due to different gas types. |
| Mixing system |
3 float flowmeters are installed on a movable frame, which can be pushed and mixed with three different gases at the same time. The flow range of the first gas is 10-100 cc/min. The second gas flow range is 16-160 cc/min. The third gas flow range is 25-250 cc/min. A pressure gauge is installed in the mobile plus, the pressure gauge is directly connected to the gas mixing box in the mobile frame to monitor the pressure of the mixed gas |
| valve | Four stainless steel valves are installed on the side panels of the movable frame at the three gas inlets |
| size | Furnace: 550 x 380 x 520 Mobile frame: 600x600x597 |
| Open the door and power off | In order to ensure safe use, the electric furnace is designed to open the door and cut off power |
| net weight | About 60KG |
| Shipping weight | 600 lbs |
| Warranty | One-year warranty period, except for related consumables, such as consumable parts such as furnace tubes and seals |
