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Position:Home > Products > Tube Furnace > Multi-Zone Tube Furnace > Three zones Tube Furnaces >
1100℃ Three-Zone Open type Tube Furnace
1100℃ Three-Zone Open type Tube Furnace

1100℃ Three-Zone Open type Tube Furnace

Model:KJ-1100X-III

Description:

KJ-1100X-III furnace is a three-zone tube furnace with optional 8.5" or 11" or 15"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening.

Detailed
Specific Introduction:
    KJ-1100X-III furnace is a three-zone tube furnace with optional 8.5" or 11" or 15"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30 segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing, and sintering processes.
Parameters:
Furnace structure
  • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.  
  • Hinged type flange with water cold for sample loading at easy
  • This furnace can be used as annealing or diffusion furnace for 12" wafer uses a quartz boat 
  • Electrical lid actuator provides easy & hassle-free lid opening
Heating zone
  • Total heating zone length 100mm (40")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C)
  • Cross section Temperature tolerance: +/- 3°C
Working temperature
  • Max heating temperature: 1100°C 
  • Max heating & cooling rate: 10°C/min
  • SiC heating elements, a total of 36 pcs 
Temperature control
 
Three digital controllers with PID/self-tuning functions and 30 segments programmable.
Thermocouple: three K type thermocouples (one for each zone)
Control accuracy: +/- 1°C
Software for PC control is available as optional ( click picture on the left to order )
The Eurotherm temperature controller is available within +/- 0.1ºC at the extra cost
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Fused quartz tube
    
  • Can accommodate 8.5" or 11" or 15" O.D quartz tube with 71" Length, please select tube size in the option bar
  • High purity quartz tube, please click the bottom left picture to view.
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
Vacuum sealing & Flange A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps.
One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Options
  • The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes
    • One 48"L ( 1/4"OD)  K type calibration thermocouple
    • One Omega temperature calibrator
    • 5 feet long thermocouple power extension wire
  • You may consider ordering turbopump for hi-vacuum up to 10-5 torr
  •  4'' ~ 8'' large size quartz boats
  • We can make the furnace into a verticle upon request.
Rated Voltage
  • Three Phase, 208V AC, 50/60 Hz  ( 3 phase 380V is  optional)
  • AWG 8# Power cord is included (without plug) 
Power consumption Max. 20KW (100A breaker required)
Product Dimension  2000 L x 765W x 1130 H mm
Net weight 300kg
Shipping dimension 85" x 40" x 70"
Shipping weight 1200 lbs
Warranty
  • One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
  • You may contact us to order replacement quartz tube
Compliance
  • CE Certified
  • NRTL or NRTLCSA Certification is available upon request at the extra cost
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar 
  • Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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Contact Information
E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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