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Position:Home > Products > CVD/PECVD System > CVD Furnace System >
1200℃ double temperature zone open type vacuum tube furnace
1200℃ double temperature zone open type vacuum tube furnace

1200℃ double temperature zone open type vacuum tube furnace

Model:KJ-1200X-80-II

Description:

KJ-1200X-80-II is a CE-certified dual-temperature zone tube furnace CVD system with a tube diameter of 80mm. It uses a dual-rotary vane mechanical pump. The gas supply system is a three-way float gas supply system. Mix 1-3 kinds of gases, the vacuum degree can reach 10-2 torr.

Detailed
Specific Introduction:
    KJ-1200X-80-II is a CE-certified dual-temperature zone tube furnace CVD system with a tube diameter of 80mm. It uses a dual-rotary vane mechanical pump. The gas supply system is a three-way float gas supply system. Mix 1-3 kinds of gases, the vacuum degree can reach 10-2 torr.
Parameters:
Furnace structure
  • Double shell structure with separate cooling
  • The surface of the inner furnace is coated with a high-temperature alumina coating imported from the United States, which can improve the heating efficiency of the equipment and also extend the life of the instrument.
Power
  • 2.5 KW
Voltage
  • AC 208-240V single phase, 50/60 Hz
Heating element
  • Fe-Cr-Al Alloy doped by Mo
Working temperature
  • 1200 ℃
Continuous working temperature
  • 1100 ℃
Maximum heating rate
  • ≤20 ℃ /min
Furnace tube size and material
  • Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Length of heating zone
  • Two heating zones: 200 mm (8") each
  • Total heating zone length 400 mm

Temperature Controller
  • Two precise temperature controllers, individually control two temperature zones
  • PID control via PWM solid state relay
  •  30 programmable intelligent temperature regulators, 30 sections of temperature rising and falling programs can be set
  • With overheating and burnout protection
Temperature control accuracy
  • +/- 1 ℃
Vacuum sealing system · Two stainless steel sealing flanges, with KF-25 interface on the flange and a mechanical pressure gauge installed on the flange (the blue meter in the picture is optional) 
· Vacuum degree: The vacuum degree can reach 5.5 m-torr. (5.5x10-3 torr) through the mechanical pump. If you want to obtain a higher vacuum degree, you can use a molecular pump, and the vacuum degree can reach 10-5 torr.
 ·Leakage rate <5 m-torr/min
Vacuum pump The double-rotation mechanical pump is used, and the oil filter is installed on the mechanical pump, which can filter the oil fume generated when the vacuum pump is working, reduce the loss of pump oil, and protect the environment and human health. The minimum particle diameter of the filter is 0.3 microns.
Anticorrosive vacuum gauge Optional: The anti-corrosion digital vacuum indicator imported by our company has a measurement range of 3.8x10-5 to 1125 Torr. There is no need for coefficient conversion due to different gas types.
Mixing system 3 float flowmeters are installed on a movable frame, which can be pushed and mixed with three different gases at the same time. 
The flow range of the first gas is 10-100 cc/min. The second gas flow range is 16-160 cc/min.
The third gas flow range is 25-250 cc/min.
 A pressure gauge is installed in the mobile plus, the pressure gauge is directly connected to the gas mixing box in the mobile frame to monitor the pressure of the mixed gas
valve Four stainless steel valves are installed on the side panels of the movable frame at the three gas inlets
size Furnace: 550 x 380 x 520 Mobile frame: 600x600x597
Open the door and power off In order to ensure safe use, the electric furnace is designed to open the door and cut off power
net weight About 60KG
Shipping weight 600 lbs
Warranty One-year warranty period, except for related consumables, such as consumable parts such as furnace tubes and seals
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E-mail:web@kejiafurnace.com
Tell:+(86) 181-3719-5600
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
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